JPS5418670A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5418670A
JPS5418670A JP8300177A JP8300177A JPS5418670A JP S5418670 A JPS5418670 A JP S5418670A JP 8300177 A JP8300177 A JP 8300177A JP 8300177 A JP8300177 A JP 8300177A JP S5418670 A JPS5418670 A JP S5418670A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
sic
evaporating
diffuse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8300177A
Other languages
Japanese (ja)
Inventor
Yasuhide Matsuda
Masao Tsuruoka
Kunihiro Matsukuma
Original Assignee
Hitachi Ltd
Hitachi Haramachi Semiconductor Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Haramachi Semiconductor Ltd filed Critical Hitachi Ltd
Priority to JP8300177A priority Critical patent/JPS5418670A/en
Publication of JPS5418670A publication Critical patent/JPS5418670A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the production cost of the semiconductor device, by putting B2O3 into a container made of SiC and then evaporating the B2O3 in order to diffuse it into the semiconductor substrate.
COPYRIGHT: (C)1979,JPO&Japio
JP8300177A 1977-07-13 1977-07-13 Manufacture of semiconductor device Pending JPS5418670A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8300177A JPS5418670A (en) 1977-07-13 1977-07-13 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8300177A JPS5418670A (en) 1977-07-13 1977-07-13 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5418670A true JPS5418670A (en) 1979-02-10

Family

ID=13789996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8300177A Pending JPS5418670A (en) 1977-07-13 1977-07-13 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5418670A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101368A (en) * 1985-10-25 1987-05-11 Nippon Steel Corp Production of clad ingot

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101368A (en) * 1985-10-25 1987-05-11 Nippon Steel Corp Production of clad ingot

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