JPS5210070A - Method for manufacturing silicon semiconductor device - Google Patents
Method for manufacturing silicon semiconductor deviceInfo
- Publication number
- JPS5210070A JPS5210070A JP8605675A JP8605675A JPS5210070A JP S5210070 A JPS5210070 A JP S5210070A JP 8605675 A JP8605675 A JP 8605675A JP 8605675 A JP8605675 A JP 8605675A JP S5210070 A JPS5210070 A JP S5210070A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- silicon semiconductor
- manufacturing silicon
- decreasing
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To prevent decreasing of dielectric strength of an element and prevent increasing of substrate surface density caused by formation of a glass film by means of injection of ions into the substrate surface for the purpose of decreasing the surface density.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8605675A JPS5210070A (en) | 1975-07-14 | 1975-07-14 | Method for manufacturing silicon semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8605675A JPS5210070A (en) | 1975-07-14 | 1975-07-14 | Method for manufacturing silicon semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5210070A true JPS5210070A (en) | 1977-01-26 |
JPS5744028B2 JPS5744028B2 (en) | 1982-09-18 |
Family
ID=13876022
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8605675A Granted JPS5210070A (en) | 1975-07-14 | 1975-07-14 | Method for manufacturing silicon semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5210070A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017009760A1 (en) | 2016-10-21 | 2018-04-26 | Fanuc Corporation | Numerical control device and control method for a numerical control device |
-
1975
- 1975-07-14 JP JP8605675A patent/JPS5210070A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102017009760A1 (en) | 2016-10-21 | 2018-04-26 | Fanuc Corporation | Numerical control device and control method for a numerical control device |
DE102017009760B4 (en) | 2016-10-21 | 2020-01-02 | Fanuc Corporation | Numerical control device and control method for a numerical control device |
Also Published As
Publication number | Publication date |
---|---|
JPS5744028B2 (en) | 1982-09-18 |
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