JPS5218182A - Manufacturing process for separation layers for formation of semicondu ctor devices - Google Patents

Manufacturing process for separation layers for formation of semicondu ctor devices

Info

Publication number
JPS5218182A
JPS5218182A JP9317775A JP9317775A JPS5218182A JP S5218182 A JPS5218182 A JP S5218182A JP 9317775 A JP9317775 A JP 9317775A JP 9317775 A JP9317775 A JP 9317775A JP S5218182 A JPS5218182 A JP S5218182A
Authority
JP
Japan
Prior art keywords
formation
manufacturing process
separation layers
devices
semicondu ctor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9317775A
Other languages
Japanese (ja)
Other versions
JPS5540185B2 (en
Inventor
Ryosaku Komatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9317775A priority Critical patent/JPS5218182A/en
Publication of JPS5218182A publication Critical patent/JPS5218182A/en
Publication of JPS5540185B2 publication Critical patent/JPS5540185B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: Make an insulation layer for separation on semiconductor substrate surface by the ion implantation method.
COPYRIGHT: (C)1977,JPO&Japio
JP9317775A 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices Granted JPS5218182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9317775A JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9317775A JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Publications (2)

Publication Number Publication Date
JPS5218182A true JPS5218182A (en) 1977-02-10
JPS5540185B2 JPS5540185B2 (en) 1980-10-16

Family

ID=14075280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9317775A Granted JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Country Status (1)

Country Link
JP (1) JPS5218182A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH708428A1 (en) 2013-08-12 2015-02-13 Wrh Walter Reist Holding Ag Conveyor with a two-dimensionally extended conveyor member.

Also Published As

Publication number Publication date
JPS5540185B2 (en) 1980-10-16

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