JPS5218182A - Manufacturing process for separation layers for formation of semicondu ctor devices - Google Patents
Manufacturing process for separation layers for formation of semicondu ctor devicesInfo
- Publication number
- JPS5218182A JPS5218182A JP9317775A JP9317775A JPS5218182A JP S5218182 A JPS5218182 A JP S5218182A JP 9317775 A JP9317775 A JP 9317775A JP 9317775 A JP9317775 A JP 9317775A JP S5218182 A JPS5218182 A JP S5218182A
- Authority
- JP
- Japan
- Prior art keywords
- formation
- manufacturing process
- separation layers
- devices
- semicondu ctor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Make an insulation layer for separation on semiconductor substrate surface by the ion implantation method.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9317775A JPS5218182A (en) | 1975-08-01 | 1975-08-01 | Manufacturing process for separation layers for formation of semicondu ctor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9317775A JPS5218182A (en) | 1975-08-01 | 1975-08-01 | Manufacturing process for separation layers for formation of semicondu ctor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5218182A true JPS5218182A (en) | 1977-02-10 |
JPS5540185B2 JPS5540185B2 (en) | 1980-10-16 |
Family
ID=14075280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9317775A Granted JPS5218182A (en) | 1975-08-01 | 1975-08-01 | Manufacturing process for separation layers for formation of semicondu ctor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5218182A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH708428A1 (en) | 2013-08-12 | 2015-02-13 | Wrh Walter Reist Holding Ag | Conveyor with a two-dimensionally extended conveyor member. |
-
1975
- 1975-08-01 JP JP9317775A patent/JPS5218182A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5540185B2 (en) | 1980-10-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS53108390A (en) | Semiconductor device and its manufacture | |
JPS5226182A (en) | Manufacturing method of semi-conductor unit | |
JPS54589A (en) | Burying method of insulator | |
JPS5240969A (en) | Process for production of semiconductor device | |
JPS5249772A (en) | Process for production of semiconductor device | |
JPS5218182A (en) | Manufacturing process for separation layers for formation of semicondu ctor devices | |
JPS5240968A (en) | Process for production of semiconductor device | |
JPS5248468A (en) | Process for production of semiconductor device | |
JPS5235980A (en) | Manufacturing method of semiconductor device | |
JPS5230185A (en) | Process for producing semiconductor device | |
JPS5249781A (en) | Process for production of semiconductor device | |
JPS5211773A (en) | Method of manufacturing semiconductor device | |
JPS53137685A (en) | Manufacture for semiconductor device | |
JPS5329086A (en) | Production of semiconductor device | |
JPS5373075A (en) | Treatment method for wafer surface | |
JPS51113461A (en) | A method for manufacturing semiconductor devices | |
JPS526477A (en) | Method for multi-layer film formation | |
JPS51140493A (en) | Method of fabricating mis semiconductor device | |
JPS51120690A (en) | Manufacturing method for semiconductor apparatus | |
JPS51144184A (en) | Production method of semiconductor unit | |
JPS5227363A (en) | Formation method of glass film | |
JPS5356981A (en) | Production of semiconductor device | |
JPS5243372A (en) | Process for production of semiconductor | |
JPS5240070A (en) | Process for production of semiconductor device | |
JPS51147284A (en) | Manufacturing process of semiconductor device |