JPS5540185B2 - - Google Patents

Info

Publication number
JPS5540185B2
JPS5540185B2 JP9317775A JP9317775A JPS5540185B2 JP S5540185 B2 JPS5540185 B2 JP S5540185B2 JP 9317775 A JP9317775 A JP 9317775A JP 9317775 A JP9317775 A JP 9317775A JP S5540185 B2 JPS5540185 B2 JP S5540185B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9317775A
Other languages
Japanese (ja)
Other versions
JPS5218182A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9317775A priority Critical patent/JPS5218182A/en
Publication of JPS5218182A publication Critical patent/JPS5218182A/en
Publication of JPS5540185B2 publication Critical patent/JPS5540185B2/ja
Granted legal-status Critical Current

Links

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  • Element Separation (AREA)
JP9317775A 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices Granted JPS5218182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9317775A JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9317775A JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Publications (2)

Publication Number Publication Date
JPS5218182A JPS5218182A (en) 1977-02-10
JPS5540185B2 true JPS5540185B2 (en) 1980-10-16

Family

ID=14075280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9317775A Granted JPS5218182A (en) 1975-08-01 1975-08-01 Manufacturing process for separation layers for formation of semicondu ctor devices

Country Status (1)

Country Link
JP (1) JPS5218182A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694983B2 (en) 2013-08-12 2017-07-04 Wrh Walter Reist Holding Ag Conveying device with an extensively extended conveying element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694983B2 (en) 2013-08-12 2017-07-04 Wrh Walter Reist Holding Ag Conveying device with an extensively extended conveying element

Also Published As

Publication number Publication date
JPS5218182A (en) 1977-02-10

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