JPS5356981A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5356981A
JPS5356981A JP13048576A JP13048576A JPS5356981A JP S5356981 A JPS5356981 A JP S5356981A JP 13048576 A JP13048576 A JP 13048576A JP 13048576 A JP13048576 A JP 13048576A JP S5356981 A JPS5356981 A JP S5356981A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
insulation film
insulation
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13048576A
Other languages
Japanese (ja)
Inventor
Hisao Katsuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13048576A priority Critical patent/JPS5356981A/en
Publication of JPS5356981A publication Critical patent/JPS5356981A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To flatten the surface of elements by forming and fabricating wiring layers such as Al then depositing an insulation film thereon and removing the insulation film over the insulation layers through etching.
COPYRIGHT: (C)1978,JPO&Japio
JP13048576A 1976-11-01 1976-11-01 Production of semiconductor device Pending JPS5356981A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13048576A JPS5356981A (en) 1976-11-01 1976-11-01 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13048576A JPS5356981A (en) 1976-11-01 1976-11-01 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5356981A true JPS5356981A (en) 1978-05-23

Family

ID=15035372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13048576A Pending JPS5356981A (en) 1976-11-01 1976-11-01 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5356981A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0974136A (en) * 1995-09-07 1997-03-18 Nec Corp Manufacture for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0974136A (en) * 1995-09-07 1997-03-18 Nec Corp Manufacture for semiconductor device

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