JPS5349964A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5349964A JPS5349964A JP12380176A JP12380176A JPS5349964A JP S5349964 A JPS5349964 A JP S5349964A JP 12380176 A JP12380176 A JP 12380176A JP 12380176 A JP12380176 A JP 12380176A JP S5349964 A JPS5349964 A JP S5349964A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- insulator film
- minimize
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
Abstract
PURPOSE: To minimize the space between the adjacent different kinds of diffusion layers and thus to increase the integration performance, by coating the first insulator film on the semiconductor substrate surface along with the second insulator film of anti-oxidation property featuring different etching velocity and then by forming each diffusion layer through selective removal.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12380176A JPS5349964A (en) | 1976-10-18 | 1976-10-18 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12380176A JPS5349964A (en) | 1976-10-18 | 1976-10-18 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5349964A true JPS5349964A (en) | 1978-05-06 |
JPS6214948B2 JPS6214948B2 (en) | 1987-04-04 |
Family
ID=14869642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12380176A Granted JPS5349964A (en) | 1976-10-18 | 1976-10-18 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5349964A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56135965A (en) * | 1980-03-28 | 1981-10-23 | Nec Corp | Semiconductor device |
US6829030B2 (en) | 2000-06-15 | 2004-12-07 | Seiko Epson Corporation | Electro-optic device and electronic apparatus |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS498228A (en) * | 1972-03-23 | 1974-01-24 | ||
JPS509390A (en) * | 1973-05-22 | 1975-01-30 | ||
JPS5010579A (en) * | 1973-05-25 | 1975-02-03 | ||
JPS50130374A (en) * | 1974-03-30 | 1975-10-15 |
-
1976
- 1976-10-18 JP JP12380176A patent/JPS5349964A/en active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS498228A (en) * | 1972-03-23 | 1974-01-24 | ||
JPS509390A (en) * | 1973-05-22 | 1975-01-30 | ||
JPS5010579A (en) * | 1973-05-25 | 1975-02-03 | ||
JPS50130374A (en) * | 1974-03-30 | 1975-10-15 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56135965A (en) * | 1980-03-28 | 1981-10-23 | Nec Corp | Semiconductor device |
US6829030B2 (en) | 2000-06-15 | 2004-12-07 | Seiko Epson Corporation | Electro-optic device and electronic apparatus |
US6963384B2 (en) | 2000-06-15 | 2005-11-08 | Seiko Epson Corporation | Electro-optical device and electronic apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS6214948B2 (en) | 1987-04-04 |
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