Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
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Filing date
Publication date
Application filed by Mitsubishi Electric CorpfiledCriticalMitsubishi Electric Corp
Priority to JP14272676ApriorityCriticalpatent/JPS5367387A/en
Publication of JPS5367387ApublicationCriticalpatent/JPS5367387A/en
PURPOSE: To eliminate the effect of production parameters by forming a diffusion resistance layer in a semiconductor substrate for forming resistance elements away from an isolation oxide film.
COPYRIGHT: (C)1978,JPO&Japio
JP14272676A1976-11-271976-11-27Production of semiconductor device
PendingJPS5367387A
(en)