JPS52129279A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS52129279A JPS52129279A JP4492476A JP4492476A JPS52129279A JP S52129279 A JPS52129279 A JP S52129279A JP 4492476 A JP4492476 A JP 4492476A JP 4492476 A JP4492476 A JP 4492476A JP S52129279 A JPS52129279 A JP S52129279A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- adhesiveness
- matal
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To make buried electrodes in electrode windows by using a matal material which has poor adhesiveness to an insulation layer and good adhesiveness to Si substrates.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4492476A JPS52129279A (en) | 1976-04-22 | 1976-04-22 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4492476A JPS52129279A (en) | 1976-04-22 | 1976-04-22 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52129279A true JPS52129279A (en) | 1977-10-29 |
Family
ID=12705007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4492476A Pending JPS52129279A (en) | 1976-04-22 | 1976-04-22 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52129279A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5831522A (en) * | 1981-08-18 | 1983-02-24 | Fujitsu Ltd | Forming method of contact electrode |
JPS58202550A (en) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | Electrode connecting method |
JP2003086531A (en) * | 2001-09-07 | 2003-03-20 | Seiko Instruments Inc | Method for manufacturing pattern electrode, and pattern electrode manufactured by the method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5143674A (en) * | 1974-10-14 | 1976-04-14 | Oki Electric Ind Co Ltd | Handotaisochino denkyokukeiseiho |
-
1976
- 1976-04-22 JP JP4492476A patent/JPS52129279A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5143674A (en) * | 1974-10-14 | 1976-04-14 | Oki Electric Ind Co Ltd | Handotaisochino denkyokukeiseiho |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5831522A (en) * | 1981-08-18 | 1983-02-24 | Fujitsu Ltd | Forming method of contact electrode |
JPS58202550A (en) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | Electrode connecting method |
JPH0576186B2 (en) * | 1982-05-21 | 1993-10-22 | Hitachi Ltd | |
JP2003086531A (en) * | 2001-09-07 | 2003-03-20 | Seiko Instruments Inc | Method for manufacturing pattern electrode, and pattern electrode manufactured by the method |
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