JPS53110464A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS53110464A
JPS53110464A JP2490177A JP2490177A JPS53110464A JP S53110464 A JPS53110464 A JP S53110464A JP 2490177 A JP2490177 A JP 2490177A JP 2490177 A JP2490177 A JP 2490177A JP S53110464 A JPS53110464 A JP S53110464A
Authority
JP
Japan
Prior art keywords
semiconductor device
layer
establish
pure
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2490177A
Other languages
Japanese (ja)
Inventor
Shohei Shima
Rokuro Yoshizawa
Naotake Tadama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2490177A priority Critical patent/JPS53110464A/en
Publication of JPS53110464A publication Critical patent/JPS53110464A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To establish the contact resistance which is most suitable with a good reproducibility, by forming the Al electrode layer on the diffusion layer of the Si substrate via almost pure Al thin layer.
COPYRIGHT: (C)1978,JPO&Japio
JP2490177A 1977-03-09 1977-03-09 Semiconductor device Pending JPS53110464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2490177A JPS53110464A (en) 1977-03-09 1977-03-09 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2490177A JPS53110464A (en) 1977-03-09 1977-03-09 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS53110464A true JPS53110464A (en) 1978-09-27

Family

ID=12151076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2490177A Pending JPS53110464A (en) 1977-03-09 1977-03-09 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS53110464A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108738A (en) * 1981-12-22 1983-06-28 Seiko Instr & Electronics Ltd Manufacture of electrode for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108738A (en) * 1981-12-22 1983-06-28 Seiko Instr & Electronics Ltd Manufacture of electrode for semiconductor device

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