JPS53135291A - Production of semiconductor substance - Google Patents
Production of semiconductor substanceInfo
- Publication number
- JPS53135291A JPS53135291A JP5020877A JP5020877A JPS53135291A JP S53135291 A JPS53135291 A JP S53135291A JP 5020877 A JP5020877 A JP 5020877A JP 5020877 A JP5020877 A JP 5020877A JP S53135291 A JPS53135291 A JP S53135291A
- Authority
- JP
- Japan
- Prior art keywords
- production
- separating
- semiconductor substance
- area
- layer above
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To make a device high-density with preventing the generation of branchshaped reaction holes from separating areas, by providing an impurity diffusion layer on the substrate surface surrounding the area, where the separating area will be formed, and forming the separating area inside the substrate surrounded by the layer above after making the layer above porous.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5020877A JPS584818B2 (en) | 1977-04-30 | 1977-04-30 | Method for manufacturing semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5020877A JPS584818B2 (en) | 1977-04-30 | 1977-04-30 | Method for manufacturing semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53135291A true JPS53135291A (en) | 1978-11-25 |
JPS584818B2 JPS584818B2 (en) | 1983-01-27 |
Family
ID=12852676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5020877A Expired JPS584818B2 (en) | 1977-04-30 | 1977-04-30 | Method for manufacturing semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584818B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0501119A2 (en) * | 1991-01-16 | 1992-09-02 | Canon Kabushiki Kaisha | Method of producing semiconductor substrate |
-
1977
- 1977-04-30 JP JP5020877A patent/JPS584818B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0501119A2 (en) * | 1991-01-16 | 1992-09-02 | Canon Kabushiki Kaisha | Method of producing semiconductor substrate |
EP0501119A3 (en) * | 1991-01-16 | 1995-03-01 | Canon Kk |
Also Published As
Publication number | Publication date |
---|---|
JPS584818B2 (en) | 1983-01-27 |
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