JPS53136958A - Selective impurity diffusion method into semiconductor substrate - Google Patents
Selective impurity diffusion method into semiconductor substrateInfo
- Publication number
- JPS53136958A JPS53136958A JP5138777A JP5138777A JPS53136958A JP S53136958 A JPS53136958 A JP S53136958A JP 5138777 A JP5138777 A JP 5138777A JP 5138777 A JP5138777 A JP 5138777A JP S53136958 A JPS53136958 A JP S53136958A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- impurity diffusion
- diffusion method
- selective impurity
- selective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To carry out a selective oxidation by sticking an oxidation suppression layer to an impurity-added poly Si which is formed on the substrate via a thin film, and then to form a diffusion layer within the substrate via the thin film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5138777A JPS6028383B2 (en) | 1977-05-04 | 1977-05-04 | Selective impurity diffusion method into semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5138777A JPS6028383B2 (en) | 1977-05-04 | 1977-05-04 | Selective impurity diffusion method into semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53136958A true JPS53136958A (en) | 1978-11-29 |
JPS6028383B2 JPS6028383B2 (en) | 1985-07-04 |
Family
ID=12885524
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5138777A Expired JPS6028383B2 (en) | 1977-05-04 | 1977-05-04 | Selective impurity diffusion method into semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6028383B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153146A (en) * | 1990-05-28 | 1992-10-06 | Kabushiki Kaisha Toshiba | Maufacturing method of semiconductor devices |
-
1977
- 1977-05-04 JP JP5138777A patent/JPS6028383B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153146A (en) * | 1990-05-28 | 1992-10-06 | Kabushiki Kaisha Toshiba | Maufacturing method of semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
JPS6028383B2 (en) | 1985-07-04 |
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