JPS5275276A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5275276A JPS5275276A JP15257675A JP15257675A JPS5275276A JP S5275276 A JPS5275276 A JP S5275276A JP 15257675 A JP15257675 A JP 15257675A JP 15257675 A JP15257675 A JP 15257675A JP S5275276 A JPS5275276 A JP S5275276A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- film
- production
- disconnected
- depositing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Element Separation (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain a semiconductor device of higher density by depositing an Mo film on the poly Si film selectively formed on an Si substrate, and further forming an Al film thereon so as to be disconnected by the side faces of the Mo film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15257675A JPS5275276A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15257675A JPS5275276A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275276A true JPS5275276A (en) | 1977-06-24 |
JPS5530296B2 JPS5530296B2 (en) | 1980-08-09 |
Family
ID=15543481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15257675A Granted JPS5275276A (en) | 1975-12-19 | 1975-12-19 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275276A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6068612A (en) * | 1983-09-26 | 1985-04-19 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56165617U (en) * | 1980-05-12 | 1981-12-08 |
-
1975
- 1975-12-19 JP JP15257675A patent/JPS5275276A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6068612A (en) * | 1983-09-26 | 1985-04-19 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
Also Published As
Publication number | Publication date |
---|---|
JPS5530296B2 (en) | 1980-08-09 |
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