JPS5275276A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5275276A
JPS5275276A JP15257675A JP15257675A JPS5275276A JP S5275276 A JPS5275276 A JP S5275276A JP 15257675 A JP15257675 A JP 15257675A JP 15257675 A JP15257675 A JP 15257675A JP S5275276 A JPS5275276 A JP S5275276A
Authority
JP
Japan
Prior art keywords
semiconductor device
film
production
disconnected
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15257675A
Other languages
Japanese (ja)
Other versions
JPS5530296B2 (en
Inventor
Takashi Osone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15257675A priority Critical patent/JPS5275276A/en
Publication of JPS5275276A publication Critical patent/JPS5275276A/en
Publication of JPS5530296B2 publication Critical patent/JPS5530296B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain a semiconductor device of higher density by depositing an Mo film on the poly Si film selectively formed on an Si substrate, and further forming an Al film thereon so as to be disconnected by the side faces of the Mo film.
COPYRIGHT: (C)1977,JPO&Japio
JP15257675A 1975-12-19 1975-12-19 Production of semiconductor device Granted JPS5275276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15257675A JPS5275276A (en) 1975-12-19 1975-12-19 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15257675A JPS5275276A (en) 1975-12-19 1975-12-19 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5275276A true JPS5275276A (en) 1977-06-24
JPS5530296B2 JPS5530296B2 (en) 1980-08-09

Family

ID=15543481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15257675A Granted JPS5275276A (en) 1975-12-19 1975-12-19 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5275276A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068612A (en) * 1983-09-26 1985-04-19 Oki Electric Ind Co Ltd Manufacture of semiconductor element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165617U (en) * 1980-05-12 1981-12-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068612A (en) * 1983-09-26 1985-04-19 Oki Electric Ind Co Ltd Manufacture of semiconductor element

Also Published As

Publication number Publication date
JPS5530296B2 (en) 1980-08-09

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