JPS5271993A - Production of semiconductor integrated circuit device - Google Patents
Production of semiconductor integrated circuit deviceInfo
- Publication number
- JPS5271993A JPS5271993A JP14795975A JP14795975A JPS5271993A JP S5271993 A JPS5271993 A JP S5271993A JP 14795975 A JP14795975 A JP 14795975A JP 14795975 A JP14795975 A JP 14795975A JP S5271993 A JPS5271993 A JP S5271993A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- circuit device
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To produce a semiconductor device of high reliability by forming a poly Si layer on the insulating film on an element surface and further forming a metal layer through photo resist then selectively removing the poly Si.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14795975A JPS5271993A (en) | 1975-12-11 | 1975-12-11 | Production of semiconductor integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14795975A JPS5271993A (en) | 1975-12-11 | 1975-12-11 | Production of semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5271993A true JPS5271993A (en) | 1977-06-15 |
Family
ID=15441942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14795975A Pending JPS5271993A (en) | 1975-12-11 | 1975-12-11 | Production of semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5271993A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5637648A (en) * | 1979-09-04 | 1981-04-11 | Nec Corp | Manufacturing of semiconductor device |
-
1975
- 1975-12-11 JP JP14795975A patent/JPS5271993A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5637648A (en) * | 1979-09-04 | 1981-04-11 | Nec Corp | Manufacturing of semiconductor device |
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