JPS545659A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS545659A JPS545659A JP7128877A JP7128877A JPS545659A JP S545659 A JPS545659 A JP S545659A JP 7128877 A JP7128877 A JP 7128877A JP 7128877 A JP7128877 A JP 7128877A JP S545659 A JPS545659 A JP S545659A
- Authority
- JP
- Japan
- Prior art keywords
- film
- manufacture
- semiconductor device
- installetion
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To facilitate an easy formation of a minute pattern composed of a thick metal film by having a lift-off with installetion twice of the mask of the photo resist film when forming a metal electrode film onto the semiconductor substrate via an insulator film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7128877A JPS545659A (en) | 1977-06-15 | 1977-06-15 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7128877A JPS545659A (en) | 1977-06-15 | 1977-06-15 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS545659A true JPS545659A (en) | 1979-01-17 |
Family
ID=13456352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7128877A Pending JPS545659A (en) | 1977-06-15 | 1977-06-15 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS545659A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6199199A (en) * | 1984-09-28 | 1986-05-17 | 株式会社東芝 | Voice analyzer/synthesizer |
JP2012064945A (en) * | 2010-09-20 | 2012-03-29 | Toshiba Corp | Semiconductor device and method for manufacturing the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509549A (en) * | 1973-05-30 | 1975-01-31 | ||
JPS5038059A (en) * | 1973-07-31 | 1975-04-09 | ||
JPS5224478A (en) * | 1975-08-20 | 1977-02-23 | Matsushita Electric Ind Co Ltd | Semiconductor device manufacturing process |
-
1977
- 1977-06-15 JP JP7128877A patent/JPS545659A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS509549A (en) * | 1973-05-30 | 1975-01-31 | ||
JPS5038059A (en) * | 1973-07-31 | 1975-04-09 | ||
JPS5224478A (en) * | 1975-08-20 | 1977-02-23 | Matsushita Electric Ind Co Ltd | Semiconductor device manufacturing process |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6199199A (en) * | 1984-09-28 | 1986-05-17 | 株式会社東芝 | Voice analyzer/synthesizer |
JPH0552960B2 (en) * | 1984-09-28 | 1993-08-06 | Tokyo Shibaura Electric Co | |
JP2012064945A (en) * | 2010-09-20 | 2012-03-29 | Toshiba Corp | Semiconductor device and method for manufacturing the same |
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