JPS509549A - - Google Patents
Info
- Publication number
- JPS509549A JPS509549A JP6067573A JP6067573A JPS509549A JP S509549 A JPS509549 A JP S509549A JP 6067573 A JP6067573 A JP 6067573A JP 6067573 A JP6067573 A JP 6067573A JP S509549 A JPS509549 A JP S509549A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Manufacture Or Reproduction Of Printing Formes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6067573A JPS509549A (en) | 1973-05-30 | 1973-05-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6067573A JPS509549A (en) | 1973-05-30 | 1973-05-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS509549A true JPS509549A (en) | 1975-01-31 |
Family
ID=13149121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6067573A Pending JPS509549A (en) | 1973-05-30 | 1973-05-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS509549A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5272175A (en) * | 1975-12-12 | 1977-06-16 | Mitsubishi Electric Corp | Mask patterning of resist meterial |
| JPS545659A (en) * | 1977-06-15 | 1979-01-17 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS5711344A (en) * | 1980-06-25 | 1982-01-21 | Mitsubishi Electric Corp | Dry developing method |
| JPS5746241A (en) * | 1980-09-04 | 1982-03-16 | Mitsubishi Electric Corp | Reversal dry developing method |
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1973
- 1973-05-30 JP JP6067573A patent/JPS509549A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5272175A (en) * | 1975-12-12 | 1977-06-16 | Mitsubishi Electric Corp | Mask patterning of resist meterial |
| JPS545659A (en) * | 1977-06-15 | 1979-01-17 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS5711344A (en) * | 1980-06-25 | 1982-01-21 | Mitsubishi Electric Corp | Dry developing method |
| JPH0313583B2 (en) * | 1980-06-25 | 1991-02-22 | Mitsubishi Electric Corp | |
| JPS5746241A (en) * | 1980-09-04 | 1982-03-16 | Mitsubishi Electric Corp | Reversal dry developing method |
| JPH0432379B2 (en) * | 1980-09-04 | 1992-05-29 |