JPS5435683A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5435683A
JPS5435683A JP10188877A JP10188877A JPS5435683A JP S5435683 A JPS5435683 A JP S5435683A JP 10188877 A JP10188877 A JP 10188877A JP 10188877 A JP10188877 A JP 10188877A JP S5435683 A JPS5435683 A JP S5435683A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
gate electrode
insulating film
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10188877A
Other languages
Japanese (ja)
Inventor
Nozomi Harada
Shigeru Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10188877A priority Critical patent/JPS5435683A/en
Publication of JPS5435683A publication Critical patent/JPS5435683A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the side etching of a gate electrode by oxidizing the exposed surface of a gate electrode when etching an insulating film except the gate insulating film using the gate electrode as a mask.
COPYRIGHT: (C)1979,JPO&Japio
JP10188877A 1977-08-25 1977-08-25 Manufacture of semiconductor device Pending JPS5435683A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10188877A JPS5435683A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10188877A JPS5435683A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5435683A true JPS5435683A (en) 1979-03-15

Family

ID=14312462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10188877A Pending JPS5435683A (en) 1977-08-25 1977-08-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5435683A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02110482U (en) * 1989-02-16 1990-09-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02110482U (en) * 1989-02-16 1990-09-04

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