JPS5435683A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5435683A JPS5435683A JP10188877A JP10188877A JPS5435683A JP S5435683 A JPS5435683 A JP S5435683A JP 10188877 A JP10188877 A JP 10188877A JP 10188877 A JP10188877 A JP 10188877A JP S5435683 A JPS5435683 A JP S5435683A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- gate electrode
- insulating film
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To prevent the side etching of a gate electrode by oxidizing the exposed surface of a gate electrode when etching an insulating film except the gate insulating film using the gate electrode as a mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10188877A JPS5435683A (en) | 1977-08-25 | 1977-08-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10188877A JPS5435683A (en) | 1977-08-25 | 1977-08-25 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5435683A true JPS5435683A (en) | 1979-03-15 |
Family
ID=14312462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10188877A Pending JPS5435683A (en) | 1977-08-25 | 1977-08-25 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5435683A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02110482U (en) * | 1989-02-16 | 1990-09-04 |
-
1977
- 1977-08-25 JP JP10188877A patent/JPS5435683A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02110482U (en) * | 1989-02-16 | 1990-09-04 |
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