JPS52112287A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS52112287A JPS52112287A JP2898076A JP2898076A JPS52112287A JP S52112287 A JPS52112287 A JP S52112287A JP 2898076 A JP2898076 A JP 2898076A JP 2898076 A JP2898076 A JP 2898076A JP S52112287 A JPS52112287 A JP S52112287A
- Authority
- JP
- Japan
- Prior art keywords
- insulation film
- gate
- manufacture
- semiconductor device
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent over-etching of insulation film and thus to increase gate antipressure property by coating liquid insulation material onto exposed insulation film and by calcinating the insulation material before performing etching using gate electrode for the mask as well as window opening on the gate insulation film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2898076A JPS52112287A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2898076A JPS52112287A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52112287A true JPS52112287A (en) | 1977-09-20 |
Family
ID=12263553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2898076A Pending JPS52112287A (en) | 1976-03-17 | 1976-03-17 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52112287A (en) |
-
1976
- 1976-03-17 JP JP2898076A patent/JPS52112287A/en active Pending
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