JPS52112287A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52112287A
JPS52112287A JP2898076A JP2898076A JPS52112287A JP S52112287 A JPS52112287 A JP S52112287A JP 2898076 A JP2898076 A JP 2898076A JP 2898076 A JP2898076 A JP 2898076A JP S52112287 A JPS52112287 A JP S52112287A
Authority
JP
Japan
Prior art keywords
insulation film
gate
manufacture
semiconductor device
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2898076A
Other languages
Japanese (ja)
Inventor
Akira Abiru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2898076A priority Critical patent/JPS52112287A/en
Publication of JPS52112287A publication Critical patent/JPS52112287A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent over-etching of insulation film and thus to increase gate antipressure property by coating liquid insulation material onto exposed insulation film and by calcinating the insulation material before performing etching using gate electrode for the mask as well as window opening on the gate insulation film.
COPYRIGHT: (C)1977,JPO&Japio
JP2898076A 1976-03-17 1976-03-17 Manufacture of semiconductor device Pending JPS52112287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2898076A JPS52112287A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2898076A JPS52112287A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52112287A true JPS52112287A (en) 1977-09-20

Family

ID=12263553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2898076A Pending JPS52112287A (en) 1976-03-17 1976-03-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52112287A (en)

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