JPS5338980A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5338980A JPS5338980A JP11307576A JP11307576A JPS5338980A JP S5338980 A JPS5338980 A JP S5338980A JP 11307576 A JP11307576 A JP 11307576A JP 11307576 A JP11307576 A JP 11307576A JP S5338980 A JPS5338980 A JP S5338980A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- film
- sio
- sharp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To obtain a highly reliable ohmic electrode by ensuring a good adhesion property through coating of the photo resist film after removing the glass powder grains on SiO2 film and by making a sharp and minute electrode window.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11307576A JPS5338980A (en) | 1976-09-22 | 1976-09-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11307576A JPS5338980A (en) | 1976-09-22 | 1976-09-22 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5338980A true JPS5338980A (en) | 1978-04-10 |
Family
ID=14602837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11307576A Pending JPS5338980A (en) | 1976-09-22 | 1976-09-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5338980A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50117569A (en) * | 1974-02-27 | 1975-09-13 | ||
JPS53118809U (en) * | 1977-02-28 | 1978-09-21 | ||
JPS5577454U (en) * | 1978-11-21 | 1980-05-28 |
-
1976
- 1976-09-22 JP JP11307576A patent/JPS5338980A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50117569A (en) * | 1974-02-27 | 1975-09-13 | ||
JPS5746842B2 (en) * | 1974-02-27 | 1982-10-06 | ||
JPS53118809U (en) * | 1977-02-28 | 1978-09-21 | ||
JPS5577454U (en) * | 1978-11-21 | 1980-05-28 |
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