JPS52146176A - Formation of electrode in semiconductor device - Google Patents
Formation of electrode in semiconductor deviceInfo
- Publication number
- JPS52146176A JPS52146176A JP6253176A JP6253176A JPS52146176A JP S52146176 A JPS52146176 A JP S52146176A JP 6253176 A JP6253176 A JP 6253176A JP 6253176 A JP6253176 A JP 6253176A JP S52146176 A JPS52146176 A JP S52146176A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- formation
- semiconductor device
- varying
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To form an electrode showing good adhesion by varying a depositing rate when a metal for the electrode is deposited to a semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6253176A JPS52146176A (en) | 1976-05-28 | 1976-05-28 | Formation of electrode in semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6253176A JPS52146176A (en) | 1976-05-28 | 1976-05-28 | Formation of electrode in semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52146176A true JPS52146176A (en) | 1977-12-05 |
JPS5723411B2 JPS5723411B2 (en) | 1982-05-18 |
Family
ID=13202867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6253176A Granted JPS52146176A (en) | 1976-05-28 | 1976-05-28 | Formation of electrode in semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52146176A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63296216A (en) * | 1987-05-27 | 1988-12-02 | Meidensha Electric Mfg Co Ltd | Formation of electrode for semiconductor device |
WO2015050007A1 (en) * | 2013-10-02 | 2015-04-09 | アイシン精機株式会社 | Metal-tone film production method and vehicle-use outside door handle |
-
1976
- 1976-05-28 JP JP6253176A patent/JPS52146176A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63296216A (en) * | 1987-05-27 | 1988-12-02 | Meidensha Electric Mfg Co Ltd | Formation of electrode for semiconductor device |
WO2015050007A1 (en) * | 2013-10-02 | 2015-04-09 | アイシン精機株式会社 | Metal-tone film production method and vehicle-use outside door handle |
CN105637112A (en) * | 2013-10-02 | 2016-06-01 | 爱信精机株式会社 | Metal-tone film production method and vehicle-use outside door handle |
JP6090467B2 (en) * | 2013-10-02 | 2017-03-08 | アイシン精機株式会社 | Method of manufacturing metal-tone film and outside door handle for vehicle |
Also Published As
Publication number | Publication date |
---|---|
JPS5723411B2 (en) | 1982-05-18 |
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