JPS52146176A - Formation of electrode in semiconductor device - Google Patents

Formation of electrode in semiconductor device

Info

Publication number
JPS52146176A
JPS52146176A JP6253176A JP6253176A JPS52146176A JP S52146176 A JPS52146176 A JP S52146176A JP 6253176 A JP6253176 A JP 6253176A JP 6253176 A JP6253176 A JP 6253176A JP S52146176 A JPS52146176 A JP S52146176A
Authority
JP
Japan
Prior art keywords
electrode
formation
semiconductor device
varying
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6253176A
Other languages
Japanese (ja)
Other versions
JPS5723411B2 (en
Inventor
Masao Kachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP6253176A priority Critical patent/JPS52146176A/en
Publication of JPS52146176A publication Critical patent/JPS52146176A/en
Publication of JPS5723411B2 publication Critical patent/JPS5723411B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To form an electrode showing good adhesion by varying a depositing rate when a metal for the electrode is deposited to a semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP6253176A 1976-05-28 1976-05-28 Formation of electrode in semiconductor device Granted JPS52146176A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6253176A JPS52146176A (en) 1976-05-28 1976-05-28 Formation of electrode in semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6253176A JPS52146176A (en) 1976-05-28 1976-05-28 Formation of electrode in semiconductor device

Publications (2)

Publication Number Publication Date
JPS52146176A true JPS52146176A (en) 1977-12-05
JPS5723411B2 JPS5723411B2 (en) 1982-05-18

Family

ID=13202867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6253176A Granted JPS52146176A (en) 1976-05-28 1976-05-28 Formation of electrode in semiconductor device

Country Status (1)

Country Link
JP (1) JPS52146176A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296216A (en) * 1987-05-27 1988-12-02 Meidensha Electric Mfg Co Ltd Formation of electrode for semiconductor device
WO2015050007A1 (en) * 2013-10-02 2015-04-09 アイシン精機株式会社 Metal-tone film production method and vehicle-use outside door handle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63296216A (en) * 1987-05-27 1988-12-02 Meidensha Electric Mfg Co Ltd Formation of electrode for semiconductor device
WO2015050007A1 (en) * 2013-10-02 2015-04-09 アイシン精機株式会社 Metal-tone film production method and vehicle-use outside door handle
CN105637112A (en) * 2013-10-02 2016-06-01 爱信精机株式会社 Metal-tone film production method and vehicle-use outside door handle
JP6090467B2 (en) * 2013-10-02 2017-03-08 アイシン精機株式会社 Method of manufacturing metal-tone film and outside door handle for vehicle

Also Published As

Publication number Publication date
JPS5723411B2 (en) 1982-05-18

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