JPS5399769A - Formation of insulating film onto semiconductor substrate - Google Patents
Formation of insulating film onto semiconductor substrateInfo
- Publication number
- JPS5399769A JPS5399769A JP1447877A JP1447877A JPS5399769A JP S5399769 A JPS5399769 A JP S5399769A JP 1447877 A JP1447877 A JP 1447877A JP 1447877 A JP1447877 A JP 1447877A JP S5399769 A JPS5399769 A JP S5399769A
- Authority
- JP
- Japan
- Prior art keywords
- formation
- insulating film
- semiconductor substrate
- film onto
- onto semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To form can insulating glass film while keeping the GaAs surface stable, by depositing the material of vapor-phased Vb-or VIb-group while cleansing the substrate surface with vapor-pahsed VIIb-group material.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1447877A JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1447877A JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5399769A true JPS5399769A (en) | 1978-08-31 |
JPS5625778B2 JPS5625778B2 (en) | 1981-06-15 |
Family
ID=11862158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1447877A Granted JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5399769A (en) |
-
1977
- 1977-02-12 JP JP1447877A patent/JPS5399769A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5625778B2 (en) | 1981-06-15 |
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