JPS5625778B2 - - Google Patents
Info
- Publication number
- JPS5625778B2 JPS5625778B2 JP1447877A JP1447877A JPS5625778B2 JP S5625778 B2 JPS5625778 B2 JP S5625778B2 JP 1447877 A JP1447877 A JP 1447877A JP 1447877 A JP1447877 A JP 1447877A JP S5625778 B2 JPS5625778 B2 JP S5625778B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1447877A JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1447877A JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5399769A JPS5399769A (en) | 1978-08-31 |
| JPS5625778B2 true JPS5625778B2 (en) | 1981-06-15 |
Family
ID=11862158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1447877A Granted JPS5399769A (en) | 1977-02-12 | 1977-02-12 | Formation of insulating film onto semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5399769A (en) |
-
1977
- 1977-02-12 JP JP1447877A patent/JPS5399769A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5399769A (en) | 1978-08-31 |