JPS5436192A - Manufacture for semiconductor - Google Patents

Manufacture for semiconductor

Info

Publication number
JPS5436192A
JPS5436192A JP10290177A JP10290177A JPS5436192A JP S5436192 A JPS5436192 A JP S5436192A JP 10290177 A JP10290177 A JP 10290177A JP 10290177 A JP10290177 A JP 10290177A JP S5436192 A JPS5436192 A JP S5436192A
Authority
JP
Japan
Prior art keywords
plane
semiconductor
manufacture
growing
protecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10290177A
Other languages
Japanese (ja)
Other versions
JPS6136370B2 (en
Inventor
Tsutomu Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10290177A priority Critical patent/JPS5436192A/en
Publication of JPS5436192A publication Critical patent/JPS5436192A/en
Publication of JPS6136370B2 publication Critical patent/JPS6136370B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To avoid the decrease in the yield rate for element formation, by preventing the effect to the first plane on growing by protecting the first plane of the semiconductor substrate with insulation film and by using the process growing the epitaxial layer on the second major plane.
COPYRIGHT: (C)1979,JPO&Japio
JP10290177A 1977-08-26 1977-08-26 Manufacture for semiconductor Granted JPS5436192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10290177A JPS5436192A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10290177A JPS5436192A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor

Publications (2)

Publication Number Publication Date
JPS5436192A true JPS5436192A (en) 1979-03-16
JPS6136370B2 JPS6136370B2 (en) 1986-08-18

Family

ID=14339754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10290177A Granted JPS5436192A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor

Country Status (1)

Country Link
JP (1) JPS5436192A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260259A (en) * 1985-09-05 1987-03-16 オイペック・オイロペーイッシェ・ゲゼルシャフト・フュール・ライスツングスハルプライター・エムベーハー・ウント・コンパニイ・コマンディートゲゼルシャフト Asymmetrical thyristor and manufacturing thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6260259A (en) * 1985-09-05 1987-03-16 オイペック・オイロペーイッシェ・ゲゼルシャフト・フュール・ライスツングスハルプライター・エムベーハー・ウント・コンパニイ・コマンディートゲゼルシャフト Asymmetrical thyristor and manufacturing thereof

Also Published As

Publication number Publication date
JPS6136370B2 (en) 1986-08-18

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