JPS5322382A - Production of dielectric isolating substrate - Google Patents
Production of dielectric isolating substrateInfo
- Publication number
- JPS5322382A JPS5322382A JP9603076A JP9603076A JPS5322382A JP S5322382 A JPS5322382 A JP S5322382A JP 9603076 A JP9603076 A JP 9603076A JP 9603076 A JP9603076 A JP 9603076A JP S5322382 A JPS5322382 A JP S5322382A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- production
- isolating substrate
- dielectric isolating
- insulation film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To obtain island of single crystals of varying thicknesses by isolating a semiconductor substrate surface to the portion covered with an insulation film and the portion where a single crystal exposes, growing a polycrystalline semiconductor on the insulation film and a single crystal on the single crystal and again providing isolating grooves in the deposited single crystal.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9603076A JPS5322382A (en) | 1976-08-13 | 1976-08-13 | Production of dielectric isolating substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9603076A JPS5322382A (en) | 1976-08-13 | 1976-08-13 | Production of dielectric isolating substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5322382A true JPS5322382A (en) | 1978-03-01 |
Family
ID=14153998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9603076A Pending JPS5322382A (en) | 1976-08-13 | 1976-08-13 | Production of dielectric isolating substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5322382A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62298129A (en) * | 1986-06-18 | 1987-12-25 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
-
1976
- 1976-08-13 JP JP9603076A patent/JPS5322382A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62298129A (en) * | 1986-06-18 | 1987-12-25 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
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