JPS5322382A - Production of dielectric isolating substrate - Google Patents

Production of dielectric isolating substrate

Info

Publication number
JPS5322382A
JPS5322382A JP9603076A JP9603076A JPS5322382A JP S5322382 A JPS5322382 A JP S5322382A JP 9603076 A JP9603076 A JP 9603076A JP 9603076 A JP9603076 A JP 9603076A JP S5322382 A JPS5322382 A JP S5322382A
Authority
JP
Japan
Prior art keywords
single crystal
production
isolating substrate
dielectric isolating
insulation film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9603076A
Other languages
Japanese (ja)
Inventor
Junjiro Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9603076A priority Critical patent/JPS5322382A/en
Publication of JPS5322382A publication Critical patent/JPS5322382A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To obtain island of single crystals of varying thicknesses by isolating a semiconductor substrate surface to the portion covered with an insulation film and the portion where a single crystal exposes, growing a polycrystalline semiconductor on the insulation film and a single crystal on the single crystal and again providing isolating grooves in the deposited single crystal.
COPYRIGHT: (C)1978,JPO&Japio
JP9603076A 1976-08-13 1976-08-13 Production of dielectric isolating substrate Pending JPS5322382A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9603076A JPS5322382A (en) 1976-08-13 1976-08-13 Production of dielectric isolating substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9603076A JPS5322382A (en) 1976-08-13 1976-08-13 Production of dielectric isolating substrate

Publications (1)

Publication Number Publication Date
JPS5322382A true JPS5322382A (en) 1978-03-01

Family

ID=14153998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9603076A Pending JPS5322382A (en) 1976-08-13 1976-08-13 Production of dielectric isolating substrate

Country Status (1)

Country Link
JP (1) JPS5322382A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298129A (en) * 1986-06-18 1987-12-25 Hitachi Ltd Semiconductor integrated circuit device and manufacture thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62298129A (en) * 1986-06-18 1987-12-25 Hitachi Ltd Semiconductor integrated circuit device and manufacture thereof

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