JPS5363986A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5363986A JPS5363986A JP13999476A JP13999476A JPS5363986A JP S5363986 A JPS5363986 A JP S5363986A JP 13999476 A JP13999476 A JP 13999476A JP 13999476 A JP13999476 A JP 13999476A JP S5363986 A JPS5363986 A JP S5363986A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- impurity
- source
- drain regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To flatten element surface and avert the disconnection of metal wirings by providing gate insulation films having openings corresponding to source, drain regions on a semiconductor substrate, growing a polycrystalline layer containing an impurity thereon and diffusing the impurity into the source, drain regions from said layer.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13999476A JPS5363986A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13999476A JPS5363986A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5363986A true JPS5363986A (en) | 1978-06-07 |
Family
ID=15258451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13999476A Pending JPS5363986A (en) | 1976-11-19 | 1976-11-19 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5363986A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57166048A (en) * | 1981-04-06 | 1982-10-13 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit |
JPS60198862A (en) * | 1984-03-23 | 1985-10-08 | Nec Corp | Semiconductor integrated circuit device |
-
1976
- 1976-11-19 JP JP13999476A patent/JPS5363986A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57166048A (en) * | 1981-04-06 | 1982-10-13 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit |
JPS60198862A (en) * | 1984-03-23 | 1985-10-08 | Nec Corp | Semiconductor integrated circuit device |
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