Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co LtdfiledCriticalMatsushita Electric Industrial Co Ltd
Priority to JP15684276ApriorityCriticalpatent/JPS5379377A/en
Publication of JPS5379377ApublicationCriticalpatent/JPS5379377A/en
PURPOSE: To prevent th eleaking and shorting between electrodes and substrate even if junctions are shallow by providing a polycrystalline Si film under Al wirings in regions excuding source and drain contact parts.
COPYRIGHT: (C)1978,JPO&Japio
JP15684276A1976-12-231976-12-23Production of semiconductor device
PendingJPS5379377A
(en)