JPS5288276A - Liquid-phase epitaxial growth - Google Patents
Liquid-phase epitaxial growthInfo
- Publication number
- JPS5288276A JPS5288276A JP409176A JP409176A JPS5288276A JP S5288276 A JPS5288276 A JP S5288276A JP 409176 A JP409176 A JP 409176A JP 409176 A JP409176 A JP 409176A JP S5288276 A JPS5288276 A JP S5288276A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- liquid
- phase epitaxial
- phase
- constructing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: In constructing a multi-layer structure in a semiconductor device, it is intended to provide a method of effecting liquid-phase epitaxial growth which can produce a thin, flat epitaxial layer with good reproducibility.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP409176A JPS5288276A (en) | 1976-01-19 | 1976-01-19 | Liquid-phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP409176A JPS5288276A (en) | 1976-01-19 | 1976-01-19 | Liquid-phase epitaxial growth |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5288276A true JPS5288276A (en) | 1977-07-23 |
JPS5440234B2 JPS5440234B2 (en) | 1979-12-03 |
Family
ID=11575113
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP409176A Granted JPS5288276A (en) | 1976-01-19 | 1976-01-19 | Liquid-phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5288276A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558626U (en) * | 1978-06-30 | 1980-01-21 | ||
JPS56155527A (en) * | 1980-04-30 | 1981-12-01 | Fujitsu Ltd | Apparatus for liquid phase epitaxial growth |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4937569A (en) * | 1972-08-09 | 1974-04-08 |
-
1976
- 1976-01-19 JP JP409176A patent/JPS5288276A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4937569A (en) * | 1972-08-09 | 1974-04-08 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS558626U (en) * | 1978-06-30 | 1980-01-21 | ||
JPS56155527A (en) * | 1980-04-30 | 1981-12-01 | Fujitsu Ltd | Apparatus for liquid phase epitaxial growth |
Also Published As
Publication number | Publication date |
---|---|
JPS5440234B2 (en) | 1979-12-03 |
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