JPS5289599A - Liquid phase eptaxial growth - Google Patents

Liquid phase eptaxial growth

Info

Publication number
JPS5289599A
JPS5289599A JP583876A JP583876A JPS5289599A JP S5289599 A JPS5289599 A JP S5289599A JP 583876 A JP583876 A JP 583876A JP 583876 A JP583876 A JP 583876A JP S5289599 A JPS5289599 A JP S5289599A
Authority
JP
Japan
Prior art keywords
liquid phase
growth
eptaxial
melt
eptaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP583876A
Other languages
Japanese (ja)
Other versions
JPS5543439B2 (en
Inventor
Masaaki Sakuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP583876A priority Critical patent/JPS5289599A/en
Publication of JPS5289599A publication Critical patent/JPS5289599A/en
Publication of JPS5543439B2 publication Critical patent/JPS5543439B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To produce a plane AlxGa1 -x As epitaxial layer with good crystallinity in a high reproducing manner by placing an Al - Ga - As melt for O2 adsorption along with a melt for growth into a reaction system and carrying out liquid phase epitaxial growth.
COPYRIGHT: (C)1977,JPO&Japio
JP583876A 1976-01-23 1976-01-23 Liquid phase eptaxial growth Granted JPS5289599A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP583876A JPS5289599A (en) 1976-01-23 1976-01-23 Liquid phase eptaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP583876A JPS5289599A (en) 1976-01-23 1976-01-23 Liquid phase eptaxial growth

Publications (2)

Publication Number Publication Date
JPS5289599A true JPS5289599A (en) 1977-07-27
JPS5543439B2 JPS5543439B2 (en) 1980-11-06

Family

ID=11622160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP583876A Granted JPS5289599A (en) 1976-01-23 1976-01-23 Liquid phase eptaxial growth

Country Status (1)

Country Link
JP (1) JPS5289599A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0433031Y2 (en) * 1987-05-28 1992-08-07
JPH0433030Y2 (en) * 1987-05-28 1992-08-07

Also Published As

Publication number Publication date
JPS5543439B2 (en) 1980-11-06

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