JPS5259568A - Liquid phase epitaxial growth - Google Patents

Liquid phase epitaxial growth

Info

Publication number
JPS5259568A
JPS5259568A JP13469875A JP13469875A JPS5259568A JP S5259568 A JPS5259568 A JP S5259568A JP 13469875 A JP13469875 A JP 13469875A JP 13469875 A JP13469875 A JP 13469875A JP S5259568 A JPS5259568 A JP S5259568A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
phase epitaxial
substrate
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13469875A
Other languages
Japanese (ja)
Inventor
Jisaburo Ushizawa
Yukio Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13469875A priority Critical patent/JPS5259568A/en
Publication of JPS5259568A publication Critical patent/JPS5259568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form good quality eqitaxial layers by separating protecting cover from substrate near the place where by substrate is contacted with a solution, and performing epitaxial growth by dipping the substrate in the solution.
COPYRIGHT: (C)1977,JPO&Japio
JP13469875A 1975-11-11 1975-11-11 Liquid phase epitaxial growth Pending JPS5259568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13469875A JPS5259568A (en) 1975-11-11 1975-11-11 Liquid phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13469875A JPS5259568A (en) 1975-11-11 1975-11-11 Liquid phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS5259568A true JPS5259568A (en) 1977-05-17

Family

ID=15134493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13469875A Pending JPS5259568A (en) 1975-11-11 1975-11-11 Liquid phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5259568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110170A (en) * 1978-02-17 1979-08-29 Mitsubishi Chem Ind Ltd Exhaust gas treating method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110170A (en) * 1978-02-17 1979-08-29 Mitsubishi Chem Ind Ltd Exhaust gas treating method

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