JPS5259568A - Liquid phase epitaxial growth - Google Patents
Liquid phase epitaxial growthInfo
- Publication number
- JPS5259568A JPS5259568A JP13469875A JP13469875A JPS5259568A JP S5259568 A JPS5259568 A JP S5259568A JP 13469875 A JP13469875 A JP 13469875A JP 13469875 A JP13469875 A JP 13469875A JP S5259568 A JPS5259568 A JP S5259568A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- liquid phase
- phase epitaxial
- substrate
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form good quality eqitaxial layers by separating protecting cover from substrate near the place where by substrate is contacted with a solution, and performing epitaxial growth by dipping the substrate in the solution.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13469875A JPS5259568A (en) | 1975-11-11 | 1975-11-11 | Liquid phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13469875A JPS5259568A (en) | 1975-11-11 | 1975-11-11 | Liquid phase epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5259568A true JPS5259568A (en) | 1977-05-17 |
Family
ID=15134493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13469875A Pending JPS5259568A (en) | 1975-11-11 | 1975-11-11 | Liquid phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5259568A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110170A (en) * | 1978-02-17 | 1979-08-29 | Mitsubishi Chem Ind Ltd | Exhaust gas treating method |
-
1975
- 1975-11-11 JP JP13469875A patent/JPS5259568A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54110170A (en) * | 1978-02-17 | 1979-08-29 | Mitsubishi Chem Ind Ltd | Exhaust gas treating method |
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