JPS52106671A - Device of liquid phase eptaxial growth - Google Patents
Device of liquid phase eptaxial growthInfo
- Publication number
- JPS52106671A JPS52106671A JP2393976A JP2393976A JPS52106671A JP S52106671 A JPS52106671 A JP S52106671A JP 2393976 A JP2393976 A JP 2393976A JP 2393976 A JP2393976 A JP 2393976A JP S52106671 A JPS52106671 A JP S52106671A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- eptaxial
- growth
- eptaxial growth
- constitutionas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To provide a device wherein especially plural epitaxial growth layers are formed without any crack on their interfaces and contaminations from outside by use of such a constitutionas the fixed.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2393976A JPS52106671A (en) | 1976-03-05 | 1976-03-05 | Device of liquid phase eptaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2393976A JPS52106671A (en) | 1976-03-05 | 1976-03-05 | Device of liquid phase eptaxial growth |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52106671A true JPS52106671A (en) | 1977-09-07 |
JPS552890B2 JPS552890B2 (en) | 1980-01-22 |
Family
ID=12124488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2393976A Granted JPS52106671A (en) | 1976-03-05 | 1976-03-05 | Device of liquid phase eptaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52106671A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57184865U (en) * | 1981-05-18 | 1982-11-24 |
-
1976
- 1976-03-05 JP JP2393976A patent/JPS52106671A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS552890B2 (en) | 1980-01-22 |
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