JPS5228476A - Liquid phase growth apparatus - Google Patents
Liquid phase growth apparatusInfo
- Publication number
- JPS5228476A JPS5228476A JP10520375A JP10520375A JPS5228476A JP S5228476 A JPS5228476 A JP S5228476A JP 10520375 A JP10520375 A JP 10520375A JP 10520375 A JP10520375 A JP 10520375A JP S5228476 A JPS5228476 A JP S5228476A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- growth apparatus
- phase growth
- crystal layer
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: A liquid phase epitaxial growth apparatus which can form crystal layer on plural substrates.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10520375A JPS5228476A (en) | 1975-08-29 | 1975-08-29 | Liquid phase growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10520375A JPS5228476A (en) | 1975-08-29 | 1975-08-29 | Liquid phase growth apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5228476A true JPS5228476A (en) | 1977-03-03 |
Family
ID=14401097
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10520375A Pending JPS5228476A (en) | 1975-08-29 | 1975-08-29 | Liquid phase growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5228476A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6076505A (en) * | 1983-07-15 | 1985-05-01 | ユニオン・カ−バイド・コ−ポレ−シヨン | Manufacture of chlorinated ethylene polymer elastomer |
-
1975
- 1975-08-29 JP JP10520375A patent/JPS5228476A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6076505A (en) * | 1983-07-15 | 1985-05-01 | ユニオン・カ−バイド・コ−ポレ−シヨン | Manufacture of chlorinated ethylene polymer elastomer |
JPS6336604B2 (en) * | 1983-07-15 | 1988-07-21 | Union Carbide Corp |
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