JPS5228476A - Liquid phase growth apparatus - Google Patents

Liquid phase growth apparatus

Info

Publication number
JPS5228476A
JPS5228476A JP10520375A JP10520375A JPS5228476A JP S5228476 A JPS5228476 A JP S5228476A JP 10520375 A JP10520375 A JP 10520375A JP 10520375 A JP10520375 A JP 10520375A JP S5228476 A JPS5228476 A JP S5228476A
Authority
JP
Japan
Prior art keywords
liquid phase
growth apparatus
phase growth
crystal layer
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10520375A
Other languages
Japanese (ja)
Inventor
Yorimitsu Nishitani
Kenzo Akita
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10520375A priority Critical patent/JPS5228476A/en
Publication of JPS5228476A publication Critical patent/JPS5228476A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: A liquid phase epitaxial growth apparatus which can form crystal layer on plural substrates.
COPYRIGHT: (C)1977,JPO&Japio
JP10520375A 1975-08-29 1975-08-29 Liquid phase growth apparatus Pending JPS5228476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10520375A JPS5228476A (en) 1975-08-29 1975-08-29 Liquid phase growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10520375A JPS5228476A (en) 1975-08-29 1975-08-29 Liquid phase growth apparatus

Publications (1)

Publication Number Publication Date
JPS5228476A true JPS5228476A (en) 1977-03-03

Family

ID=14401097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10520375A Pending JPS5228476A (en) 1975-08-29 1975-08-29 Liquid phase growth apparatus

Country Status (1)

Country Link
JP (1) JPS5228476A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076505A (en) * 1983-07-15 1985-05-01 ユニオン・カ−バイド・コ−ポレ−シヨン Manufacture of chlorinated ethylene polymer elastomer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6076505A (en) * 1983-07-15 1985-05-01 ユニオン・カ−バイド・コ−ポレ−シヨン Manufacture of chlorinated ethylene polymer elastomer
JPS6336604B2 (en) * 1983-07-15 1988-07-21 Union Carbide Corp

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