JPS51140561A - Liquid phase epitaxial growing method - Google Patents
Liquid phase epitaxial growing methodInfo
- Publication number
- JPS51140561A JPS51140561A JP6572075A JP6572075A JPS51140561A JP S51140561 A JPS51140561 A JP S51140561A JP 6572075 A JP6572075 A JP 6572075A JP 6572075 A JP6572075 A JP 6572075A JP S51140561 A JPS51140561 A JP S51140561A
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- phase epitaxial
- growing method
- epitaxial growing
- source material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: To provide a method to obtain a high quality growing layer by contacting a source material to the upper part of liquid phase to saturate it and growing liquid phase epitaxial after drawing the source material.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6572075A JPS51140561A (en) | 1975-05-30 | 1975-05-30 | Liquid phase epitaxial growing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6572075A JPS51140561A (en) | 1975-05-30 | 1975-05-30 | Liquid phase epitaxial growing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51140561A true JPS51140561A (en) | 1976-12-03 |
JPS5742211B2 JPS5742211B2 (en) | 1982-09-07 |
Family
ID=13295125
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6572075A Granted JPS51140561A (en) | 1975-05-30 | 1975-05-30 | Liquid phase epitaxial growing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140561A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217696A (en) * | 1983-05-24 | 1984-12-07 | Hitachi Cable Ltd | Liquid-phase crystal growth apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60205008A (en) * | 1984-03-30 | 1985-10-16 | Nisshinbo Ind Inc | Coupling device |
-
1975
- 1975-05-30 JP JP6572075A patent/JPS51140561A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59217696A (en) * | 1983-05-24 | 1984-12-07 | Hitachi Cable Ltd | Liquid-phase crystal growth apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5742211B2 (en) | 1982-09-07 |
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