JPS5227353A - Cutting solution of semiconductor material - Google Patents

Cutting solution of semiconductor material

Info

Publication number
JPS5227353A
JPS5227353A JP10303075A JP10303075A JPS5227353A JP S5227353 A JPS5227353 A JP S5227353A JP 10303075 A JP10303075 A JP 10303075A JP 10303075 A JP10303075 A JP 10303075A JP S5227353 A JPS5227353 A JP S5227353A
Authority
JP
Japan
Prior art keywords
semiconductor material
cutting solution
cutting
solution
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10303075A
Other languages
Japanese (ja)
Inventor
Yuji Ochiai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10303075A priority Critical patent/JPS5227353A/en
Publication of JPS5227353A publication Critical patent/JPS5227353A/en
Pending legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Lubricants (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE: To obtain cutting solution of semiconductor material, which is capable of etching of process quality change layer simultaneously with cutting.
COPYRIGHT: (C)1977,JPO&Japio
JP10303075A 1975-08-27 1975-08-27 Cutting solution of semiconductor material Pending JPS5227353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10303075A JPS5227353A (en) 1975-08-27 1975-08-27 Cutting solution of semiconductor material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10303075A JPS5227353A (en) 1975-08-27 1975-08-27 Cutting solution of semiconductor material

Publications (1)

Publication Number Publication Date
JPS5227353A true JPS5227353A (en) 1977-03-01

Family

ID=14343241

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10303075A Pending JPS5227353A (en) 1975-08-27 1975-08-27 Cutting solution of semiconductor material

Country Status (1)

Country Link
JP (1) JPS5227353A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582922U (en) * 1981-06-30 1983-01-10 株式会社高松電気製作所 Butching of gas switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS582922U (en) * 1981-06-30 1983-01-10 株式会社高松電気製作所 Butching of gas switch

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