JPS5267272A - Formation of through-hole onto semiconductor substrate - Google Patents

Formation of through-hole onto semiconductor substrate

Info

Publication number
JPS5267272A
JPS5267272A JP14352075A JP14352075A JPS5267272A JP S5267272 A JPS5267272 A JP S5267272A JP 14352075 A JP14352075 A JP 14352075A JP 14352075 A JP14352075 A JP 14352075A JP S5267272 A JPS5267272 A JP S5267272A
Authority
JP
Japan
Prior art keywords
formation
semiconductor substrate
hole onto
onto semiconductor
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14352075A
Other languages
Japanese (ja)
Inventor
Toru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14352075A priority Critical patent/JPS5267272A/en
Publication of JPS5267272A publication Critical patent/JPS5267272A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain high-edge accuracy through-hole not through mechanical method.
COPYRIGHT: (C)1977,JPO&Japio
JP14352075A 1975-12-01 1975-12-01 Formation of through-hole onto semiconductor substrate Pending JPS5267272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14352075A JPS5267272A (en) 1975-12-01 1975-12-01 Formation of through-hole onto semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14352075A JPS5267272A (en) 1975-12-01 1975-12-01 Formation of through-hole onto semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5267272A true JPS5267272A (en) 1977-06-03

Family

ID=15340639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14352075A Pending JPS5267272A (en) 1975-12-01 1975-12-01 Formation of through-hole onto semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5267272A (en)

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