JPS5279664A - Forming method for electrodes of semiconductor devices - Google Patents

Forming method for electrodes of semiconductor devices

Info

Publication number
JPS5279664A
JPS5279664A JP15709675A JP15709675A JPS5279664A JP S5279664 A JPS5279664 A JP S5279664A JP 15709675 A JP15709675 A JP 15709675A JP 15709675 A JP15709675 A JP 15709675A JP S5279664 A JPS5279664 A JP S5279664A
Authority
JP
Japan
Prior art keywords
electrodes
forming
semiconductor devices
accurately
highly accurate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15709675A
Other languages
Japanese (ja)
Inventor
Isao Inoue
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15709675A priority Critical patent/JPS5279664A/en
Publication of JPS5279664A publication Critical patent/JPS5279664A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To accurately form electrodes having highly accurate patterns.
COPYRIGHT: (C)1977,JPO&Japio
JP15709675A 1975-12-25 1975-12-25 Forming method for electrodes of semiconductor devices Pending JPS5279664A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15709675A JPS5279664A (en) 1975-12-25 1975-12-25 Forming method for electrodes of semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15709675A JPS5279664A (en) 1975-12-25 1975-12-25 Forming method for electrodes of semiconductor devices

Publications (1)

Publication Number Publication Date
JPS5279664A true JPS5279664A (en) 1977-07-04

Family

ID=15642148

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15709675A Pending JPS5279664A (en) 1975-12-25 1975-12-25 Forming method for electrodes of semiconductor devices

Country Status (1)

Country Link
JP (1) JPS5279664A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493970A (en) * 1978-01-07 1979-07-25 Toshiba Corp Patttern forming method of multi-layer metallic thin film
JPS60183726A (en) * 1984-03-02 1985-09-19 Toshiba Corp Electrode pattern forming method of semiconductor device
JPS61141157A (en) * 1984-12-13 1986-06-28 Fuji Electric Co Ltd Manufacture of semiconductor element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5493970A (en) * 1978-01-07 1979-07-25 Toshiba Corp Patttern forming method of multi-layer metallic thin film
JPS60183726A (en) * 1984-03-02 1985-09-19 Toshiba Corp Electrode pattern forming method of semiconductor device
JPS61141157A (en) * 1984-12-13 1986-06-28 Fuji Electric Co Ltd Manufacture of semiconductor element

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