JPS5252570A - Device for production of compound semiconductor - Google Patents
Device for production of compound semiconductorInfo
- Publication number
- JPS5252570A JPS5252570A JP12828675A JP12828675A JPS5252570A JP S5252570 A JPS5252570 A JP S5252570A JP 12828675 A JP12828675 A JP 12828675A JP 12828675 A JP12828675 A JP 12828675A JP S5252570 A JPS5252570 A JP S5252570A
- Authority
- JP
- Japan
- Prior art keywords
- production
- compound semiconductor
- semiconductor material
- holding device
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE: A metal solvent holding device, other semiconductor material holding device and substrate holder are made mutually slidable, whereby the refining of a semiconductor material before growth is made possible, the localized temperature distribution of growth solution is eliminated and crystal of good quality is obtained.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12828675A JPS5252570A (en) | 1975-10-27 | 1975-10-27 | Device for production of compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12828675A JPS5252570A (en) | 1975-10-27 | 1975-10-27 | Device for production of compound semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5252570A true JPS5252570A (en) | 1977-04-27 |
Family
ID=14981053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12828675A Pending JPS5252570A (en) | 1975-10-27 | 1975-10-27 | Device for production of compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5252570A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59101823A (en) * | 1982-12-03 | 1984-06-12 | Nec Corp | Liquid-phase epitaxial growth device |
US5334278A (en) * | 1991-05-16 | 1994-08-02 | Samsung Electronics Co., Ltd. | Liquid-phase epitaxy growth system and method for growing epitaxial layer |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690965A (en) * | 1971-11-29 | 1972-09-12 | Bell Telephone Labor Inc | Semiconductor epitaxial growth from solution |
JPS4937569A (en) * | 1972-08-09 | 1974-04-08 | ||
JPS50105374A (en) * | 1974-01-28 | 1975-08-20 |
-
1975
- 1975-10-27 JP JP12828675A patent/JPS5252570A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3690965A (en) * | 1971-11-29 | 1972-09-12 | Bell Telephone Labor Inc | Semiconductor epitaxial growth from solution |
JPS4937569A (en) * | 1972-08-09 | 1974-04-08 | ||
JPS50105374A (en) * | 1974-01-28 | 1975-08-20 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59101823A (en) * | 1982-12-03 | 1984-06-12 | Nec Corp | Liquid-phase epitaxial growth device |
JPH029444B2 (en) * | 1982-12-03 | 1990-03-02 | Nippon Electric Co | |
US5334278A (en) * | 1991-05-16 | 1994-08-02 | Samsung Electronics Co., Ltd. | Liquid-phase epitaxy growth system and method for growing epitaxial layer |
US5482555A (en) * | 1991-05-16 | 1996-01-09 | Samsung Electronics Co., Ltd. | Liquid-phase epitaxy growth system and method for growing epitaxial layer |
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