JPS5425280A - Sliding liquid phase epitaxial growth apparatus - Google Patents
Sliding liquid phase epitaxial growth apparatusInfo
- Publication number
- JPS5425280A JPS5425280A JP9099377A JP9099377A JPS5425280A JP S5425280 A JPS5425280 A JP S5425280A JP 9099377 A JP9099377 A JP 9099377A JP 9099377 A JP9099377 A JP 9099377A JP S5425280 A JPS5425280 A JP S5425280A
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- liquid phase
- growth apparatus
- phase epitaxial
- sliding liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To accomplish reduction in various defficiencies inherent in epitaxial growth layer by leaving a part of growth fluxes containing a so-called shell thereof at a storage space instead of pushing out the whole thereof.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9099377A JPS5812232B2 (en) | 1977-07-28 | 1977-07-28 | Sliding liquid phase epitaxial growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9099377A JPS5812232B2 (en) | 1977-07-28 | 1977-07-28 | Sliding liquid phase epitaxial growth equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5425280A true JPS5425280A (en) | 1979-02-26 |
JPS5812232B2 JPS5812232B2 (en) | 1983-03-07 |
Family
ID=14014028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9099377A Expired JPS5812232B2 (en) | 1977-07-28 | 1977-07-28 | Sliding liquid phase epitaxial growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5812232B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143595U (en) * | 1981-03-06 | 1982-09-09 | ||
CN107779948A (en) * | 2017-11-30 | 2018-03-09 | 中国电子科技集团公司第四十八研究所 | A kind of graphite boat for horizontal rheotaxial growth |
-
1977
- 1977-07-28 JP JP9099377A patent/JPS5812232B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57143595U (en) * | 1981-03-06 | 1982-09-09 | ||
CN107779948A (en) * | 2017-11-30 | 2018-03-09 | 中国电子科技集团公司第四十八研究所 | A kind of graphite boat for horizontal rheotaxial growth |
Also Published As
Publication number | Publication date |
---|---|
JPS5812232B2 (en) | 1983-03-07 |
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