JPS5425280A - Sliding liquid phase epitaxial growth apparatus - Google Patents

Sliding liquid phase epitaxial growth apparatus

Info

Publication number
JPS5425280A
JPS5425280A JP9099377A JP9099377A JPS5425280A JP S5425280 A JPS5425280 A JP S5425280A JP 9099377 A JP9099377 A JP 9099377A JP 9099377 A JP9099377 A JP 9099377A JP S5425280 A JPS5425280 A JP S5425280A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
growth apparatus
phase epitaxial
sliding liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9099377A
Other languages
Japanese (ja)
Other versions
JPS5812232B2 (en
Inventor
Ryoichi Hirano
Toshio Tanaka
Jun Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9099377A priority Critical patent/JPS5812232B2/en
Publication of JPS5425280A publication Critical patent/JPS5425280A/en
Publication of JPS5812232B2 publication Critical patent/JPS5812232B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To accomplish reduction in various defficiencies inherent in epitaxial growth layer by leaving a part of growth fluxes containing a so-called shell thereof at a storage space instead of pushing out the whole thereof.
COPYRIGHT: (C)1979,JPO&Japio
JP9099377A 1977-07-28 1977-07-28 Sliding liquid phase epitaxial growth equipment Expired JPS5812232B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9099377A JPS5812232B2 (en) 1977-07-28 1977-07-28 Sliding liquid phase epitaxial growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9099377A JPS5812232B2 (en) 1977-07-28 1977-07-28 Sliding liquid phase epitaxial growth equipment

Publications (2)

Publication Number Publication Date
JPS5425280A true JPS5425280A (en) 1979-02-26
JPS5812232B2 JPS5812232B2 (en) 1983-03-07

Family

ID=14014028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9099377A Expired JPS5812232B2 (en) 1977-07-28 1977-07-28 Sliding liquid phase epitaxial growth equipment

Country Status (1)

Country Link
JP (1) JPS5812232B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143595U (en) * 1981-03-06 1982-09-09
CN107779948A (en) * 2017-11-30 2018-03-09 中国电子科技集团公司第四十八研究所 A kind of graphite boat for horizontal rheotaxial growth

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57143595U (en) * 1981-03-06 1982-09-09
CN107779948A (en) * 2017-11-30 2018-03-09 中国电子科技集团公司第四十八研究所 A kind of graphite boat for horizontal rheotaxial growth

Also Published As

Publication number Publication date
JPS5812232B2 (en) 1983-03-07

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