JPS548970A - Liquid phase epitaxial growth device - Google Patents

Liquid phase epitaxial growth device

Info

Publication number
JPS548970A
JPS548970A JP7518177A JP7518177A JPS548970A JP S548970 A JPS548970 A JP S548970A JP 7518177 A JP7518177 A JP 7518177A JP 7518177 A JP7518177 A JP 7518177A JP S548970 A JPS548970 A JP S548970A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
phase epitaxial
growth device
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7518177A
Other languages
Japanese (ja)
Inventor
Ryoichi Hirano
Toshio Tanaka
Jun Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7518177A priority Critical patent/JPS548970A/en
Publication of JPS548970A publication Critical patent/JPS548970A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To achieve epitaxial liquid phase epitaxial growth by pushing up a melting liquid by arranging a push piece, which pushes the melting liquid for growth into a growth chamber, under the metlint liquid for growth.
COPYRIGHT: (C)1979,JPO&Japio
JP7518177A 1977-06-23 1977-06-23 Liquid phase epitaxial growth device Pending JPS548970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7518177A JPS548970A (en) 1977-06-23 1977-06-23 Liquid phase epitaxial growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7518177A JPS548970A (en) 1977-06-23 1977-06-23 Liquid phase epitaxial growth device

Publications (1)

Publication Number Publication Date
JPS548970A true JPS548970A (en) 1979-01-23

Family

ID=13568768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7518177A Pending JPS548970A (en) 1977-06-23 1977-06-23 Liquid phase epitaxial growth device

Country Status (1)

Country Link
JP (1) JPS548970A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0710519U (en) * 1990-12-19 1995-02-14 俊 吉田 Improvement of head part of turnbuckle bolt

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015479A (en) * 1973-06-08 1975-02-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5015479A (en) * 1973-06-08 1975-02-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0710519U (en) * 1990-12-19 1995-02-14 俊 吉田 Improvement of head part of turnbuckle bolt

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