JPS5317061A - Production of semiconductor substrate - Google Patents

Production of semiconductor substrate

Info

Publication number
JPS5317061A
JPS5317061A JP9110276A JP9110276A JPS5317061A JP S5317061 A JPS5317061 A JP S5317061A JP 9110276 A JP9110276 A JP 9110276A JP 9110276 A JP9110276 A JP 9110276A JP S5317061 A JPS5317061 A JP S5317061A
Authority
JP
Japan
Prior art keywords
production
semiconductor substrate
repellent
making
long
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9110276A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9110276A priority Critical patent/JPS5317061A/en
Publication of JPS5317061A publication Critical patent/JPS5317061A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To maintain always clean surface in long-term storage by making the entire surface of substrates water-repellent.
COPYRIGHT: (C)1978,JPO&Japio
JP9110276A 1976-07-30 1976-07-30 Production of semiconductor substrate Pending JPS5317061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9110276A JPS5317061A (en) 1976-07-30 1976-07-30 Production of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9110276A JPS5317061A (en) 1976-07-30 1976-07-30 Production of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS5317061A true JPS5317061A (en) 1978-02-16

Family

ID=14017150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9110276A Pending JPS5317061A (en) 1976-07-30 1976-07-30 Production of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5317061A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278618A (en) * 1991-03-14 1994-01-11 Hitachi Koki Co., Ltd. Thermal fixing device including a non-adhesive resin coated metal belt and PTC thermistor heater

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278618A (en) * 1991-03-14 1994-01-11 Hitachi Koki Co., Ltd. Thermal fixing device including a non-adhesive resin coated metal belt and PTC thermistor heater

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