JPS5252568A - Production of semiconductor element - Google Patents

Production of semiconductor element

Info

Publication number
JPS5252568A
JPS5252568A JP12915975A JP12915975A JPS5252568A JP S5252568 A JPS5252568 A JP S5252568A JP 12915975 A JP12915975 A JP 12915975A JP 12915975 A JP12915975 A JP 12915975A JP S5252568 A JPS5252568 A JP S5252568A
Authority
JP
Japan
Prior art keywords
production
semiconductor element
pelletizing
pure water
semiconductor elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12915975A
Other languages
Japanese (ja)
Inventor
Yoshiaki Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12915975A priority Critical patent/JPS5252568A/en
Publication of JPS5252568A publication Critical patent/JPS5252568A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve quality and reliability simply by inserting a cleaning process for the surface of semiconductor elements by pure water shower between pelletizing and assembling process.
COPYRIGHT: (C)1977,JPO&Japio
JP12915975A 1975-10-27 1975-10-27 Production of semiconductor element Pending JPS5252568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12915975A JPS5252568A (en) 1975-10-27 1975-10-27 Production of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12915975A JPS5252568A (en) 1975-10-27 1975-10-27 Production of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5252568A true JPS5252568A (en) 1977-04-27

Family

ID=15002592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12915975A Pending JPS5252568A (en) 1975-10-27 1975-10-27 Production of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5252568A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543829A (en) * 1978-09-21 1980-03-27 Fujitsu Ltd Method of treatment of semiconductor substrate
JPS61204941A (en) * 1985-03-08 1986-09-11 Hitachi Ltd Conveying tray for washing apparatus
JPS6281715A (en) * 1985-10-07 1987-04-15 Nec Kyushu Ltd Semiconductor manufacturing equipment
JP2022003713A (en) * 2018-08-31 2022-01-11 ボンドテック株式会社 Bonding system and bonding method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543829A (en) * 1978-09-21 1980-03-27 Fujitsu Ltd Method of treatment of semiconductor substrate
JPS61204941A (en) * 1985-03-08 1986-09-11 Hitachi Ltd Conveying tray for washing apparatus
JPS6281715A (en) * 1985-10-07 1987-04-15 Nec Kyushu Ltd Semiconductor manufacturing equipment
JPH0350410B2 (en) * 1985-10-07 1991-08-01 Kyushu Nippon Electric
JP2022003713A (en) * 2018-08-31 2022-01-11 ボンドテック株式会社 Bonding system and bonding method

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