JPS5252568A - Production of semiconductor element - Google Patents
Production of semiconductor elementInfo
- Publication number
- JPS5252568A JPS5252568A JP12915975A JP12915975A JPS5252568A JP S5252568 A JPS5252568 A JP S5252568A JP 12915975 A JP12915975 A JP 12915975A JP 12915975 A JP12915975 A JP 12915975A JP S5252568 A JPS5252568 A JP S5252568A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor element
- pelletizing
- pure water
- semiconductor elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To improve quality and reliability simply by inserting a cleaning process for the surface of semiconductor elements by pure water shower between pelletizing and assembling process.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12915975A JPS5252568A (en) | 1975-10-27 | 1975-10-27 | Production of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12915975A JPS5252568A (en) | 1975-10-27 | 1975-10-27 | Production of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5252568A true JPS5252568A (en) | 1977-04-27 |
Family
ID=15002592
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12915975A Pending JPS5252568A (en) | 1975-10-27 | 1975-10-27 | Production of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5252568A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5543829A (en) * | 1978-09-21 | 1980-03-27 | Fujitsu Ltd | Method of treatment of semiconductor substrate |
JPS61204941A (en) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | Conveying tray for washing apparatus |
JPS6281715A (en) * | 1985-10-07 | 1987-04-15 | Nec Kyushu Ltd | Semiconductor manufacturing equipment |
JP2022003713A (en) * | 2018-08-31 | 2022-01-11 | ボンドテック株式会社 | Bonding system and bonding method |
-
1975
- 1975-10-27 JP JP12915975A patent/JPS5252568A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5543829A (en) * | 1978-09-21 | 1980-03-27 | Fujitsu Ltd | Method of treatment of semiconductor substrate |
JPS61204941A (en) * | 1985-03-08 | 1986-09-11 | Hitachi Ltd | Conveying tray for washing apparatus |
JPS6281715A (en) * | 1985-10-07 | 1987-04-15 | Nec Kyushu Ltd | Semiconductor manufacturing equipment |
JPH0350410B2 (en) * | 1985-10-07 | 1991-08-01 | Kyushu Nippon Electric | |
JP2022003713A (en) * | 2018-08-31 | 2022-01-11 | ボンドテック株式会社 | Bonding system and bonding method |
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