JPS52151561A - Polishing method of semiconductor wafers - Google Patents
Polishing method of semiconductor wafersInfo
- Publication number
- JPS52151561A JPS52151561A JP6918676A JP6918676A JPS52151561A JP S52151561 A JPS52151561 A JP S52151561A JP 6918676 A JP6918676 A JP 6918676A JP 6918676 A JP6918676 A JP 6918676A JP S52151561 A JPS52151561 A JP S52151561A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- polishing method
- polishing
- damaging
- covering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
PURPOSE: To obtain a method of polishing semiconductor wafers without damaging their surfaces by covering the polishing surface with sealing wax then polishing the surface.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6918676A JPS5953698B2 (en) | 1976-06-11 | 1976-06-11 | Polishing method for semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6918676A JPS5953698B2 (en) | 1976-06-11 | 1976-06-11 | Polishing method for semiconductor wafers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52151561A true JPS52151561A (en) | 1977-12-16 |
JPS5953698B2 JPS5953698B2 (en) | 1984-12-26 |
Family
ID=13395431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6918676A Expired JPS5953698B2 (en) | 1976-06-11 | 1976-06-11 | Polishing method for semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5953698B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109648466A (en) * | 2018-12-28 | 2019-04-19 | 深圳市芯思杰智慧传感技术有限公司 | A kind of chip sealing wax device |
-
1976
- 1976-06-11 JP JP6918676A patent/JPS5953698B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109648466A (en) * | 2018-12-28 | 2019-04-19 | 深圳市芯思杰智慧传感技术有限公司 | A kind of chip sealing wax device |
CN109648466B (en) * | 2018-12-28 | 2023-10-10 | 芯思杰技术(深圳)股份有限公司 | Chip wax sealing device |
Also Published As
Publication number | Publication date |
---|---|
JPS5953698B2 (en) | 1984-12-26 |
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