JPS51151081A - Mos type semiconductor apparatus and that manufacturing method - Google Patents

Mos type semiconductor apparatus and that manufacturing method

Info

Publication number
JPS51151081A
JPS51151081A JP50075904A JP7590475A JPS51151081A JP S51151081 A JPS51151081 A JP S51151081A JP 50075904 A JP50075904 A JP 50075904A JP 7590475 A JP7590475 A JP 7590475A JP S51151081 A JPS51151081 A JP S51151081A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor apparatus
type semiconductor
mos type
inferiarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50075904A
Other languages
Japanese (ja)
Inventor
Shigero Kuninobu
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50075904A priority Critical patent/JPS51151081A/en
Publication of JPS51151081A publication Critical patent/JPS51151081A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE: To exclude inferiarity of the operation of the apparatus, generated by difference in level, by making smoothing of the surface of the silicon semiconductor apparatus.
COPYRIGHT: (C)1976,JPO&Japio
JP50075904A 1975-06-20 1975-06-20 Mos type semiconductor apparatus and that manufacturing method Pending JPS51151081A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50075904A JPS51151081A (en) 1975-06-20 1975-06-20 Mos type semiconductor apparatus and that manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50075904A JPS51151081A (en) 1975-06-20 1975-06-20 Mos type semiconductor apparatus and that manufacturing method

Publications (1)

Publication Number Publication Date
JPS51151081A true JPS51151081A (en) 1976-12-25

Family

ID=13589778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50075904A Pending JPS51151081A (en) 1975-06-20 1975-06-20 Mos type semiconductor apparatus and that manufacturing method

Country Status (1)

Country Link
JP (1) JPS51151081A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154979A (en) * 1978-05-29 1979-12-06 Matsushita Electric Ind Co Ltd Manufacture of insulated gate type semiconductor device
JPS54158878A (en) * 1978-06-05 1979-12-15 Nec Corp Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154979A (en) * 1978-05-29 1979-12-06 Matsushita Electric Ind Co Ltd Manufacture of insulated gate type semiconductor device
JPS626664B2 (en) * 1978-05-29 1987-02-12 Matsushita Electric Ind Co Ltd
JPS54158878A (en) * 1978-06-05 1979-12-15 Nec Corp Manufacture of semiconductor device

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