JPS51151081A - Mos type semiconductor apparatus and that manufacturing method - Google Patents
Mos type semiconductor apparatus and that manufacturing methodInfo
- Publication number
- JPS51151081A JPS51151081A JP50075904A JP7590475A JPS51151081A JP S51151081 A JPS51151081 A JP S51151081A JP 50075904 A JP50075904 A JP 50075904A JP 7590475 A JP7590475 A JP 7590475A JP S51151081 A JPS51151081 A JP S51151081A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing
- semiconductor apparatus
- type semiconductor
- mos type
- inferiarity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To exclude inferiarity of the operation of the apparatus, generated by difference in level, by making smoothing of the surface of the silicon semiconductor apparatus.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075904A JPS51151081A (en) | 1975-06-20 | 1975-06-20 | Mos type semiconductor apparatus and that manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50075904A JPS51151081A (en) | 1975-06-20 | 1975-06-20 | Mos type semiconductor apparatus and that manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51151081A true JPS51151081A (en) | 1976-12-25 |
Family
ID=13589778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50075904A Pending JPS51151081A (en) | 1975-06-20 | 1975-06-20 | Mos type semiconductor apparatus and that manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51151081A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154979A (en) * | 1978-05-29 | 1979-12-06 | Matsushita Electric Ind Co Ltd | Manufacture of insulated gate type semiconductor device |
JPS54158878A (en) * | 1978-06-05 | 1979-12-15 | Nec Corp | Manufacture of semiconductor device |
-
1975
- 1975-06-20 JP JP50075904A patent/JPS51151081A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154979A (en) * | 1978-05-29 | 1979-12-06 | Matsushita Electric Ind Co Ltd | Manufacture of insulated gate type semiconductor device |
JPS626664B2 (en) * | 1978-05-29 | 1987-02-12 | Matsushita Electric Ind Co Ltd | |
JPS54158878A (en) * | 1978-06-05 | 1979-12-15 | Nec Corp | Manufacture of semiconductor device |
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