JPS5335372A - Beveling method of wafers - Google Patents
Beveling method of wafersInfo
- Publication number
- JPS5335372A JPS5335372A JP10955176A JP10955176A JPS5335372A JP S5335372 A JPS5335372 A JP S5335372A JP 10955176 A JP10955176 A JP 10955176A JP 10955176 A JP10955176 A JP 10955176A JP S5335372 A JPS5335372 A JP S5335372A
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- beveling method
- beveling
- laminate
- grindstones
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To perform beveling of wafers by making wafer laminate using spacers of a diameter smaller than that of wafers and contacting linear grindstones to the rotating laminate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10955176A JPS5335372A (en) | 1976-09-13 | 1976-09-13 | Beveling method of wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10955176A JPS5335372A (en) | 1976-09-13 | 1976-09-13 | Beveling method of wafers |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5335372A true JPS5335372A (en) | 1978-04-01 |
JPS5339740B2 JPS5339740B2 (en) | 1978-10-23 |
Family
ID=14513100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10955176A Granted JPS5335372A (en) | 1976-09-13 | 1976-09-13 | Beveling method of wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5335372A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6286242A (en) * | 1985-10-09 | 1987-04-20 | 株式会社フジタ | Reverse casting consttructin method |
JPS62125119A (en) * | 1985-11-25 | 1987-06-06 | Fudo Kenken Kk | Construction of basement |
JP2013043246A (en) * | 2011-08-24 | 2013-03-04 | Kyocera Crystal Device Corp | Method for forming crystal piece |
-
1976
- 1976-09-13 JP JP10955176A patent/JPS5335372A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6286242A (en) * | 1985-10-09 | 1987-04-20 | 株式会社フジタ | Reverse casting consttructin method |
JPS62125119A (en) * | 1985-11-25 | 1987-06-06 | Fudo Kenken Kk | Construction of basement |
JP2013043246A (en) * | 2011-08-24 | 2013-03-04 | Kyocera Crystal Device Corp | Method for forming crystal piece |
Also Published As
Publication number | Publication date |
---|---|
JPS5339740B2 (en) | 1978-10-23 |
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