JPS5214996A - Method for halting polishing work - Google Patents

Method for halting polishing work

Info

Publication number
JPS5214996A
JPS5214996A JP9029975A JP9029975A JPS5214996A JP S5214996 A JPS5214996 A JP S5214996A JP 9029975 A JP9029975 A JP 9029975A JP 9029975 A JP9029975 A JP 9029975A JP S5214996 A JPS5214996 A JP S5214996A
Authority
JP
Japan
Prior art keywords
polishing work
polishing
halting polishing
halting
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9029975A
Other languages
Japanese (ja)
Inventor
Toshihiro Kobayashi
Shinichiro Miyoshi
Etsuro Egashira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9029975A priority Critical patent/JPS5214996A/en
Publication of JPS5214996A publication Critical patent/JPS5214996A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent development of fine defectives during polishing by eliminating rapid friction force caused upon the end of polishing with a view to use for polishing of laminated face of semi-conductor wafers.
COPYRIGHT: (C)1977,JPO&Japio
JP9029975A 1975-07-25 1975-07-25 Method for halting polishing work Pending JPS5214996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9029975A JPS5214996A (en) 1975-07-25 1975-07-25 Method for halting polishing work

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9029975A JPS5214996A (en) 1975-07-25 1975-07-25 Method for halting polishing work

Publications (1)

Publication Number Publication Date
JPS5214996A true JPS5214996A (en) 1977-02-04

Family

ID=13994648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9029975A Pending JPS5214996A (en) 1975-07-25 1975-07-25 Method for halting polishing work

Country Status (1)

Country Link
JP (1) JPS5214996A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6154456U (en) * 1984-09-10 1986-04-12
JPS63166344U (en) * 1987-04-20 1988-10-28

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1200284A (en) * 1967-09-14 1970-07-29 Speedfam Corp Improvements in or relating to lapping machines

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1200284A (en) * 1967-09-14 1970-07-29 Speedfam Corp Improvements in or relating to lapping machines

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6154456U (en) * 1984-09-10 1986-04-12
JPS63166344U (en) * 1987-04-20 1988-10-28
JPH0451962Y2 (en) * 1987-04-20 1992-12-07

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