JPS5214996A - Method for halting polishing work - Google Patents
Method for halting polishing workInfo
- Publication number
- JPS5214996A JPS5214996A JP9029975A JP9029975A JPS5214996A JP S5214996 A JPS5214996 A JP S5214996A JP 9029975 A JP9029975 A JP 9029975A JP 9029975 A JP9029975 A JP 9029975A JP S5214996 A JPS5214996 A JP S5214996A
- Authority
- JP
- Japan
- Prior art keywords
- polishing work
- polishing
- halting polishing
- halting
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent development of fine defectives during polishing by eliminating rapid friction force caused upon the end of polishing with a view to use for polishing of laminated face of semi-conductor wafers.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9029975A JPS5214996A (en) | 1975-07-25 | 1975-07-25 | Method for halting polishing work |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9029975A JPS5214996A (en) | 1975-07-25 | 1975-07-25 | Method for halting polishing work |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5214996A true JPS5214996A (en) | 1977-02-04 |
Family
ID=13994648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9029975A Pending JPS5214996A (en) | 1975-07-25 | 1975-07-25 | Method for halting polishing work |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5214996A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6154456U (en) * | 1984-09-10 | 1986-04-12 | ||
JPS63166344U (en) * | 1987-04-20 | 1988-10-28 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1200284A (en) * | 1967-09-14 | 1970-07-29 | Speedfam Corp | Improvements in or relating to lapping machines |
-
1975
- 1975-07-25 JP JP9029975A patent/JPS5214996A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1200284A (en) * | 1967-09-14 | 1970-07-29 | Speedfam Corp | Improvements in or relating to lapping machines |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6154456U (en) * | 1984-09-10 | 1986-04-12 | ||
JPS63166344U (en) * | 1987-04-20 | 1988-10-28 | ||
JPH0451962Y2 (en) * | 1987-04-20 | 1992-12-07 |
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