JPS5415672A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5415672A
JPS5415672A JP8129777A JP8129777A JPS5415672A JP S5415672 A JPS5415672 A JP S5415672A JP 8129777 A JP8129777 A JP 8129777A JP 8129777 A JP8129777 A JP 8129777A JP S5415672 A JPS5415672 A JP S5415672A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
main surface
protective film
stains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8129777A
Other languages
Japanese (ja)
Inventor
Yoshinori Teto
Setsuo Hiraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP8129777A priority Critical patent/JPS5415672A/en
Publication of JPS5415672A publication Critical patent/JPS5415672A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate the stains on the main surface by forming a protective film on one main surface, polishing the main surface of the opposite side, and then etching the polished surface via the protective film used as the mask.
COPYRIGHT: (C)1979,JPO&Japio
JP8129777A 1977-07-06 1977-07-06 Manufacture of semiconductor device Pending JPS5415672A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8129777A JPS5415672A (en) 1977-07-06 1977-07-06 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8129777A JPS5415672A (en) 1977-07-06 1977-07-06 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5415672A true JPS5415672A (en) 1979-02-05

Family

ID=13742446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8129777A Pending JPS5415672A (en) 1977-07-06 1977-07-06 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5415672A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63133635A (en) * 1986-11-26 1988-06-06 Matsushita Electronics Corp Manufacture of semiconductor device
US5389579A (en) * 1993-04-05 1995-02-14 Motorola, Inc. Method for single sided polishing of a semiconductor wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507912A (en) * 1973-05-30 1975-01-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS507912A (en) * 1973-05-30 1975-01-27

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63133635A (en) * 1986-11-26 1988-06-06 Matsushita Electronics Corp Manufacture of semiconductor device
US5389579A (en) * 1993-04-05 1995-02-14 Motorola, Inc. Method for single sided polishing of a semiconductor wafer

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