JPS5415672A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5415672A JPS5415672A JP8129777A JP8129777A JPS5415672A JP S5415672 A JPS5415672 A JP S5415672A JP 8129777 A JP8129777 A JP 8129777A JP 8129777 A JP8129777 A JP 8129777A JP S5415672 A JPS5415672 A JP S5415672A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- main surface
- protective film
- stains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate the stains on the main surface by forming a protective film on one main surface, polishing the main surface of the opposite side, and then etching the polished surface via the protective film used as the mask.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8129777A JPS5415672A (en) | 1977-07-06 | 1977-07-06 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8129777A JPS5415672A (en) | 1977-07-06 | 1977-07-06 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5415672A true JPS5415672A (en) | 1979-02-05 |
Family
ID=13742446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8129777A Pending JPS5415672A (en) | 1977-07-06 | 1977-07-06 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5415672A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63133635A (en) * | 1986-11-26 | 1988-06-06 | Matsushita Electronics Corp | Manufacture of semiconductor device |
US5389579A (en) * | 1993-04-05 | 1995-02-14 | Motorola, Inc. | Method for single sided polishing of a semiconductor wafer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS507912A (en) * | 1973-05-30 | 1975-01-27 |
-
1977
- 1977-07-06 JP JP8129777A patent/JPS5415672A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS507912A (en) * | 1973-05-30 | 1975-01-27 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63133635A (en) * | 1986-11-26 | 1988-06-06 | Matsushita Electronics Corp | Manufacture of semiconductor device |
US5389579A (en) * | 1993-04-05 | 1995-02-14 | Motorola, Inc. | Method for single sided polishing of a semiconductor wafer |
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