JPS53116071A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS53116071A JPS53116071A JP3032977A JP3032977A JPS53116071A JP S53116071 A JPS53116071 A JP S53116071A JP 3032977 A JP3032977 A JP 3032977A JP 3032977 A JP3032977 A JP 3032977A JP S53116071 A JPS53116071 A JP S53116071A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- metal
- contactness
- destructing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To increase electrical contactness, by destructing contaminant and oxide film on the surface of ground metal, through mechanical polish or scratching under a vacuum immediately before vaccum deposition of metal.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3032977A JPS53116071A (en) | 1977-03-22 | 1977-03-22 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3032977A JPS53116071A (en) | 1977-03-22 | 1977-03-22 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53116071A true JPS53116071A (en) | 1978-10-11 |
Family
ID=12300759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3032977A Pending JPS53116071A (en) | 1977-03-22 | 1977-03-22 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53116071A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5594044U (en) * | 1978-12-23 | 1980-06-30 | ||
CN109257983A (en) * | 2018-09-10 | 2019-01-25 | 叶淑源 | A method of improving planting survival rate |
-
1977
- 1977-03-22 JP JP3032977A patent/JPS53116071A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5594044U (en) * | 1978-12-23 | 1980-06-30 | ||
JPS6138182Y2 (en) * | 1978-12-23 | 1986-11-05 | ||
CN109257983A (en) * | 2018-09-10 | 2019-01-25 | 叶淑源 | A method of improving planting survival rate |
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