JPS53116071A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS53116071A
JPS53116071A JP3032977A JP3032977A JPS53116071A JP S53116071 A JPS53116071 A JP S53116071A JP 3032977 A JP3032977 A JP 3032977A JP 3032977 A JP3032977 A JP 3032977A JP S53116071 A JPS53116071 A JP S53116071A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
metal
contactness
destructing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3032977A
Other languages
Japanese (ja)
Inventor
Hideaki Matsuzaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3032977A priority Critical patent/JPS53116071A/en
Publication of JPS53116071A publication Critical patent/JPS53116071A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To increase electrical contactness, by destructing contaminant and oxide film on the surface of ground metal, through mechanical polish or scratching under a vacuum immediately before vaccum deposition of metal.
COPYRIGHT: (C)1978,JPO&Japio
JP3032977A 1977-03-22 1977-03-22 Manufacture for semiconductor device Pending JPS53116071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3032977A JPS53116071A (en) 1977-03-22 1977-03-22 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3032977A JPS53116071A (en) 1977-03-22 1977-03-22 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS53116071A true JPS53116071A (en) 1978-10-11

Family

ID=12300759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3032977A Pending JPS53116071A (en) 1977-03-22 1977-03-22 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53116071A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594044U (en) * 1978-12-23 1980-06-30
CN109257983A (en) * 2018-09-10 2019-01-25 叶淑源 A method of improving planting survival rate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594044U (en) * 1978-12-23 1980-06-30
JPS6138182Y2 (en) * 1978-12-23 1986-11-05
CN109257983A (en) * 2018-09-10 2019-01-25 叶淑源 A method of improving planting survival rate

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