JPS5320780A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5320780A JPS5320780A JP9444676A JP9444676A JPS5320780A JP S5320780 A JPS5320780 A JP S5320780A JP 9444676 A JP9444676 A JP 9444676A JP 9444676 A JP9444676 A JP 9444676A JP S5320780 A JPS5320780 A JP S5320780A
- Authority
- JP
- Japan
- Prior art keywords
- film
- forming
- semiconductor device
- sio
- psg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To suppress the production of protuberances and prevent the disconnection of A wirings by forming a first film of P-As or PSG on a Si substrate or further forming a SiO2 film after depositing the same second film and specifying the P concentration in the SiO2 of these films at the time of forming emitters or collectors in the P-As or PSG film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9444676A JPS5320780A (en) | 1976-08-10 | 1976-08-10 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9444676A JPS5320780A (en) | 1976-08-10 | 1976-08-10 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5320780A true JPS5320780A (en) | 1978-02-25 |
Family
ID=14110476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9444676A Pending JPS5320780A (en) | 1976-08-10 | 1976-08-10 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320780A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5527644A (en) * | 1978-08-17 | 1980-02-27 | Nec Corp | Multi-layer wiring type semiconductor device |
-
1976
- 1976-08-10 JP JP9444676A patent/JPS5320780A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5527644A (en) * | 1978-08-17 | 1980-02-27 | Nec Corp | Multi-layer wiring type semiconductor device |
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