JPS5320780A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5320780A
JPS5320780A JP9444676A JP9444676A JPS5320780A JP S5320780 A JPS5320780 A JP S5320780A JP 9444676 A JP9444676 A JP 9444676A JP 9444676 A JP9444676 A JP 9444676A JP S5320780 A JPS5320780 A JP S5320780A
Authority
JP
Japan
Prior art keywords
film
forming
semiconductor device
sio
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9444676A
Other languages
Japanese (ja)
Inventor
Shigeyuki Sawamukai
Katsuyuki Ogawa
Hidekuni Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9444676A priority Critical patent/JPS5320780A/en
Publication of JPS5320780A publication Critical patent/JPS5320780A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To suppress the production of protuberances and prevent the disconnection of A wirings by forming a first film of P-As or PSG on a Si substrate or further forming a SiO2 film after depositing the same second film and specifying the P concentration in the SiO2 of these films at the time of forming emitters or collectors in the P-As or PSG film.
COPYRIGHT: (C)1978,JPO&Japio
JP9444676A 1976-08-10 1976-08-10 Semiconductor device Pending JPS5320780A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9444676A JPS5320780A (en) 1976-08-10 1976-08-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9444676A JPS5320780A (en) 1976-08-10 1976-08-10 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5320780A true JPS5320780A (en) 1978-02-25

Family

ID=14110476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9444676A Pending JPS5320780A (en) 1976-08-10 1976-08-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5320780A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527644A (en) * 1978-08-17 1980-02-27 Nec Corp Multi-layer wiring type semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5527644A (en) * 1978-08-17 1980-02-27 Nec Corp Multi-layer wiring type semiconductor device

Similar Documents

Publication Publication Date Title
JPS5338278A (en) Semiconductor device
JPS5253666A (en) Method of preventing impurity diffusion from doped oxide
JPS5363993A (en) Production of semiconductor device
JPS5320780A (en) Semiconductor device
JPS5317068A (en) Semiconductor device and its production
JPS531471A (en) Manufacture for semiconductor device
JPS5338980A (en) Manufacture of semiconductor device
JPS5289083A (en) Production of semiconductor photoelectric converting element
JPS5287359A (en) Production of semiconductor device
JPS5348475A (en) Production of semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS5338992A (en) Manufacture of semiconductor device
JPS5352388A (en) Semiconductor device
JPS5377168A (en) Production of semiconductor device
JPS52136588A (en) Production of semiconductor device
JPS5251872A (en) Production of semiconductor device
JPS5275276A (en) Production of semiconductor device
JPS5372482A (en) Manufacture for semiconductor device
JPS5324289A (en) Production of semiconductor device
JPS5372473A (en) Manufacture of mis type semicondctor device
JPS52149975A (en) Production of semiconductor device
JPS52119192A (en) Semiconductor
JPS5377169A (en) Production of semiconductor device
JPS52156583A (en) Electrode formation method in semiconductor device
JPS53130979A (en) Manufacture for semiconductor device