JPS5377169A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5377169A
JPS5377169A JP15304576A JP15304576A JPS5377169A JP S5377169 A JPS5377169 A JP S5377169A JP 15304576 A JP15304576 A JP 15304576A JP 15304576 A JP15304576 A JP 15304576A JP S5377169 A JPS5377169 A JP S5377169A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
sio
good quality
mesa type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15304576A
Other languages
Japanese (ja)
Inventor
Nobuhiro Inagaki
Takayuki Nakayama
Masatoshi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15304576A priority Critical patent/JPS5377169A/en
Publication of JPS5377169A publication Critical patent/JPS5377169A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)

Abstract

PURPOSE: To form a good quality mesa type layer by using two-layer structure of SiO2 and Si3N4.
COPYRIGHT: (C)1978,JPO&Japio
JP15304576A 1976-12-20 1976-12-20 Production of semiconductor device Pending JPS5377169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15304576A JPS5377169A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15304576A JPS5377169A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5377169A true JPS5377169A (en) 1978-07-08

Family

ID=15553756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15304576A Pending JPS5377169A (en) 1976-12-20 1976-12-20 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5377169A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448632A (en) * 1981-05-25 1984-05-15 Mitsubishi Denki Kabushiki Kaisha Method of fabricating semiconductor devices
JPH02148833A (en) * 1988-11-30 1990-06-07 Toshiba Corp Selective vapor growth method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4448632A (en) * 1981-05-25 1984-05-15 Mitsubishi Denki Kabushiki Kaisha Method of fabricating semiconductor devices
JPH02148833A (en) * 1988-11-30 1990-06-07 Toshiba Corp Selective vapor growth method

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