JPS52119192A - Semiconductor - Google Patents
SemiconductorInfo
- Publication number
- JPS52119192A JPS52119192A JP3582276A JP3582276A JPS52119192A JP S52119192 A JPS52119192 A JP S52119192A JP 3582276 A JP3582276 A JP 3582276A JP 3582276 A JP3582276 A JP 3582276A JP S52119192 A JPS52119192 A JP S52119192A
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor
- sio
- poly
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To prevent the oxidation of the semiconductor substrate and to avoid the inversion of the substrate by forming the SiO2 film, the Si3N4 film and the poly-crystal Si film on the semiconductor substrate and by using the process performing the selective oxidation of the poly-crystal Si film and by converting into the SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3582276A JPS52119192A (en) | 1976-03-31 | 1976-03-31 | Semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3582276A JPS52119192A (en) | 1976-03-31 | 1976-03-31 | Semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119192A true JPS52119192A (en) | 1977-10-06 |
Family
ID=12452632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3582276A Pending JPS52119192A (en) | 1976-03-31 | 1976-03-31 | Semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119192A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154271A (en) * | 1978-05-25 | 1979-12-05 | Nec Corp | Manufacture of semiconductor device |
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1976
- 1976-03-31 JP JP3582276A patent/JPS52119192A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54154271A (en) * | 1978-05-25 | 1979-12-05 | Nec Corp | Manufacture of semiconductor device |
JPH0137856B2 (en) * | 1978-05-25 | 1989-08-09 | Nippon Electric Co | |
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
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