JPS52119192A - Semiconductor - Google Patents

Semiconductor

Info

Publication number
JPS52119192A
JPS52119192A JP3582276A JP3582276A JPS52119192A JP S52119192 A JPS52119192 A JP S52119192A JP 3582276 A JP3582276 A JP 3582276A JP 3582276 A JP3582276 A JP 3582276A JP S52119192 A JPS52119192 A JP S52119192A
Authority
JP
Japan
Prior art keywords
film
semiconductor
sio
poly
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3582276A
Other languages
Japanese (ja)
Inventor
Kunio Aomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3582276A priority Critical patent/JPS52119192A/en
Publication of JPS52119192A publication Critical patent/JPS52119192A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To prevent the oxidation of the semiconductor substrate and to avoid the inversion of the substrate by forming the SiO2 film, the Si3N4 film and the poly-crystal Si film on the semiconductor substrate and by using the process performing the selective oxidation of the poly-crystal Si film and by converting into the SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
JP3582276A 1976-03-31 1976-03-31 Semiconductor Pending JPS52119192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3582276A JPS52119192A (en) 1976-03-31 1976-03-31 Semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3582276A JPS52119192A (en) 1976-03-31 1976-03-31 Semiconductor

Publications (1)

Publication Number Publication Date
JPS52119192A true JPS52119192A (en) 1977-10-06

Family

ID=12452632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3582276A Pending JPS52119192A (en) 1976-03-31 1976-03-31 Semiconductor

Country Status (1)

Country Link
JP (1) JPS52119192A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154271A (en) * 1978-05-25 1979-12-05 Nec Corp Manufacture of semiconductor device
JPS5690559A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154271A (en) * 1978-05-25 1979-12-05 Nec Corp Manufacture of semiconductor device
JPH0137856B2 (en) * 1978-05-25 1989-08-09 Nippon Electric Co
JPS5690559A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device

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