JPS546782A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS546782A
JPS546782A JP7240177A JP7240177A JPS546782A JP S546782 A JPS546782 A JP S546782A JP 7240177 A JP7240177 A JP 7240177A JP 7240177 A JP7240177 A JP 7240177A JP S546782 A JPS546782 A JP S546782A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
thin film
metal thin
crystal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7240177A
Other languages
Japanese (ja)
Inventor
Katsuhiko Suyama
Takashi Mimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7240177A priority Critical patent/JPS546782A/en
Publication of JPS546782A publication Critical patent/JPS546782A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To secure an easy formation of an isolation layer between elements by forming a metal thin film of V-group (a) on the semiconductor crystal layer and giving a selective oxidation to the crystal layer in the O2 plasma using the metal thin film as the catalyzer.
COPYRIGHT: (C)1979,JPO&Japio
JP7240177A 1977-06-17 1977-06-17 Semiconductor device and its manufacture Pending JPS546782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7240177A JPS546782A (en) 1977-06-17 1977-06-17 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7240177A JPS546782A (en) 1977-06-17 1977-06-17 Semiconductor device and its manufacture

Publications (1)

Publication Number Publication Date
JPS546782A true JPS546782A (en) 1979-01-19

Family

ID=13488208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7240177A Pending JPS546782A (en) 1977-06-17 1977-06-17 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS546782A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4933034A (en) * 1987-09-30 1990-06-12 Sumitomo Rubber Industries, Limited Bead appex applying method and device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4933034A (en) * 1987-09-30 1990-06-12 Sumitomo Rubber Industries, Limited Bead appex applying method and device

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