JPS5315766A - Selective etching method of platinum layer - Google Patents

Selective etching method of platinum layer

Info

Publication number
JPS5315766A
JPS5315766A JP8910776A JP8910776A JPS5315766A JP S5315766 A JPS5315766 A JP S5315766A JP 8910776 A JP8910776 A JP 8910776A JP 8910776 A JP8910776 A JP 8910776A JP S5315766 A JPS5315766 A JP S5315766A
Authority
JP
Japan
Prior art keywords
etching method
selective etching
platinum layer
layer
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8910776A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8910776A priority Critical patent/JPS5315766A/en
Publication of JPS5315766A publication Critical patent/JPS5315766A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To selectively etch a Pt layer with high accuracy and reproduction by forming a Si3 N4 film on the Pt layer by a CVD process and using this as a mask.
COPYRIGHT: (C)1978,JPO&Japio
JP8910776A 1976-07-28 1976-07-28 Selective etching method of platinum layer Pending JPS5315766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8910776A JPS5315766A (en) 1976-07-28 1976-07-28 Selective etching method of platinum layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8910776A JPS5315766A (en) 1976-07-28 1976-07-28 Selective etching method of platinum layer

Publications (1)

Publication Number Publication Date
JPS5315766A true JPS5315766A (en) 1978-02-14

Family

ID=13961658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8910776A Pending JPS5315766A (en) 1976-07-28 1976-07-28 Selective etching method of platinum layer

Country Status (1)

Country Link
JP (1) JPS5315766A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172415A (en) * 1985-01-16 1986-08-04 アメリカン　テレフォン　アンド　テレグラフ　カンパニー Sis type mixer having thin film lap about edge contact

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61172415A (en) * 1985-01-16 1986-08-04 アメリカン　テレフォン　アンド　テレグラフ　カンパニー Sis type mixer having thin film lap about edge contact

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